Patterning of sapphire / GaN substrates

Sami Suihkonen; Muhammad Ali; Olli Svensk; Sakari Sintonen; Markku Sopanen; Harri Lipsanen; Pekka T. Törmä; V. Nevedomsky; N Bert

doi:10.1002/pssc.201000903

Patterning of sapphire / GaN substrates

Sami Suihkonen, Muhammad Ali, Olli Svensk, Sakari Sintonen, Markku Sopanen, Harri Lipsanen, Pekka T. Törmä, V. Nevedomsky, N Bert

Not published at VTT

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1509-1512
Number of pages	4
Journal	Physica Status Solidi C: Current Topics in Solid State Physics
Volume	8
Issue number	5
DOIs	https://doi.org/10.1002/pssc.201000903
Publication status	Published - May 2011
MoE publication type	A1 Journal article-refereed

Keywords

GaN, thin film, epitaxial growth, GaN/sapphire interface, patterning

Access to Document

10.1002/pssc.201000903

Cite this

@article{91c973ecb52b4edebfa195dd9b6eaade,

title = "Patterning of sapphire / GaN substrates",

keywords = "GaN, thin film, epitaxial growth, GaN/sapphire interface, patterning",

author = "Sami Suihkonen and Muhammad Ali and Olli Svensk and Sakari Sintonen and Markku Sopanen and Harri Lipsanen and T{\"o}rm{\"a}, \{Pekka T.\} and V. Nevedomsky and N Bert",

year = "2011",

month = may,

doi = "10.1002/pssc.201000903",

language = "English",

volume = "8",

pages = "1509--1512",

journal = "Physica Status Solidi C: Current Topics in Solid State Physics",

issn = "1862-6351",

publisher = "Wiley-VCH Verlag",

number = "5",

}

TY - JOUR

T1 - Patterning of sapphire / GaN substrates

AU - Suihkonen, Sami

AU - Ali, Muhammad

AU - Svensk, Olli

AU - Sintonen, Sakari

AU - Sopanen, Markku

AU - Lipsanen, Harri

AU - Törmä, Pekka T.

AU - Nevedomsky, V.

AU - Bert, N

PY - 2011/5

Y1 - 2011/5

KW - GaN, thin film, epitaxial growth, GaN/sapphire interface, patterning

U2 - 10.1002/pssc.201000903

DO - 10.1002/pssc.201000903

M3 - Article

SN - 1862-6351

VL - 8

SP - 1509

EP - 1512

JO - Physica Status Solidi C: Current Topics in Solid State Physics

JF - Physica Status Solidi C: Current Topics in Solid State Physics

IS - 5

ER -