@article{91c973ecb52b4edebfa195dd9b6eaade,
title = "Patterning of sapphire / GaN substrates",
keywords = "GaN, thin film, epitaxial growth, GaN/sapphire interface, patterning",
author = "Sami Suihkonen and Muhammad Ali and Olli Svensk and Sakari Sintonen and Markku Sopanen and Harri Lipsanen and T{\"o}rm{\"a}, \{Pekka T.\} and V. Nevedomsky and N Bert",
year = "2011",
month = may,
doi = "10.1002/pssc.201000903",
language = "English",
volume = "8",
pages = "1509--1512",
journal = "Physica Status Solidi C: Current Topics in Solid State Physics",
issn = "1862-6351",
publisher = "Wiley-VCH Verlag",
number = "5",
}