Keyphrases
Performance Enhancement
100%
DC Bias
100%
Hydrogen Sensor
100%
Polymer Electrolyte
100%
Electrolyte Layer
66%
Room Temperature
33%
Gas Sensor
33%
Electrolyte
33%
Proton Conductivity
33%
Si Substrate
33%
Top Electrode
33%
Back Electrode
33%
Capacitive Measurement
33%
Measurement Frequency
33%
AC Voltage
33%
Polyvinyl Chloride
33%
Synthetic Air
33%
Electrolyte-insulator-semiconductor
33%
H3PW12O40
33%
Semiconductor Structures
33%
Optimal Measurement
33%
Capacitive-type
33%
SiO2 Dielectric Layer
33%
Limit of Detection
33%
Metal/Electrolyte
33%
INIS
performance
100%
polymers
100%
sensors
100%
hydrogen
100%
electrolytes
100%
layers
50%
devices
33%
voltage
33%
electrodes
33%
khz range
33%
mixtures
16%
water
16%
substrates
16%
concentration
16%
sensitivity
16%
metals
16%
amplitudes
16%
air
16%
gases
16%
platinum
16%
dielectrics
16%
semiconductor materials
16%
temperature range 0273-0400 k
16%
aluminum
16%
frequency measurement
16%
detection limits
16%
protons
16%
polyvinyl chloride
16%
Engineering
Capacitive
100%
Electrolyte Layer
100%
Dielectric Layer
50%
Detection Limit
50%
Conductive
50%
Si Substrate
50%
Gas Sensor
50%
Measurement Frequency
50%
Ac Voltage
50%
Semiconductor Structure
50%
Room Temperature
50%
Silicon Dioxide
50%
Material Science
Polymer Electrolyte
100%
Gas Sensor
33%
Platinum
33%
Semiconductor Structure
33%
Polyvinyl Chloride
33%
Aluminum
33%
Dielectric Material
33%