Phase noise in capacitively coupled micromechanical oscillators

Ville Kaajakari; Jukka K. Koskinen; Tomi Mattila

doi:10.1109/TUFFC.2005.1563277

Phase noise in capacitively coupled micromechanical oscillators

Ville Kaajakari (Corresponding Author), Jukka K. Koskinen, Tomi Mattila

Research output: Contribution to journal › Article › Scientific › peer-review

79 Citations (Scopus)

Abstract

Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators. The analytical work is complemented with simulations, and a highly efficient and accurate simulation method for a quantitative noise analysis in closed-loop oscillator applications is presented. Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.

Original language	English
Pages (from-to)	2322 - 2331
Number of pages	10
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	52
Issue number	12
DOIs	https://doi.org/10.1109/TUFFC.2005.1563277
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

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10.1109/TUFFC.2005.1563277

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title = "Phase noise in capacitively coupled micromechanical oscillators",

abstract = "Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators. The analytical work is complemented with simulations, and a highly efficient and accurate simulation method for a quantitative noise analysis in closed-loop oscillator applications is presented. Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.",

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doi = "10.1109/TUFFC.2005.1563277",

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AU - Kaajakari, Ville

AU - Koskinen, Jukka K.

AU - Mattila, Tomi

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Y1 - 2005

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AB - Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators. The analytical work is complemented with simulations, and a highly efficient and accurate simulation method for a quantitative noise analysis in closed-loop oscillator applications is presented. Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 12

ER -

Phase noise in capacitively coupled micromechanical oscillators

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