Phase noise in capacitively coupled micromechanical oscillators

Ville Kaajakari (Corresponding Author), Jukka K. Koskinen, Tomi Mattila

Research output: Contribution to journalArticleScientificpeer-review

68 Citations (Scopus)

Abstract

Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators. The analytical work is complemented with simulations, and a highly efficient and accurate simulation method for a quantitative noise analysis in closed-loop oscillator applications is presented. Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.
Original languageEnglish
Pages (from-to)2322 - 2331
Number of pages10
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume52
Issue number12
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

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