Abstract
We report the changes in dispersion relations of hypersonic acoustic phonons in free-standing silicon membranes as thin as ∼8 nm. We observe a reduction of the phase and group velocities of the fundamental flexural mode by more than 1 order of magnitude compared to bulk values. The modification of the dispersion relation in nanostructures has important consequences for noise control in nano- and microelectromechanical systems (MEMS/NEMS) as well as opto-mechanical devices.
Original language | English |
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Pages (from-to) | 3569-3573 |
Journal | Nano Letters |
Volume | 12 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2012 |
MoE publication type | A1 Journal article-refereed |
Funding
Keywords
- Confined phonons
- dispersion relations
- inelastic light scattering
- Si membranes
- slow phonons
- ultrathin