Photo-crosslinkable hybrid material with improved aging stability for integrated optics

Maja Kusevic, Arto Maaninen, Jussi Hiltunen, Marianne Hiltunen, Jarkko Tuominen, Pentti Karioja

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    In the last decade, the processing of the waveguide structures on various substrates under mild conditions has been an appealing aim. The lithographic patterning of organic-inorganic hybrid materials processed by means of sol-gel technology allows the production of waveguides and other optical components. We describe the synthesis of a new, photo-patternable, organically modified material with an improved ageing stability. Synthesis step does not involve widely used zirconia precursors, but it retains the same possibility of altering the refractive index by tailoring of the material composition. Refractive index values varied from 1.4700 to 1.5100. Measured birefringence values meet the requirements of most integrated planar optic applications. The synthesized material is compatible with silicon, glass and plastic substrates. Material was analyzed using 29Si NMR techniques. The processed slab waveguides were characterized by using the prism coupling technique at various wavelengths. The attenuation in the waveguide was determined by the cut-back method, and it was found to be less than 0.5dB/cm at the wavelength of 830 nm. The morphology of the microstructures was measured by using the interferometer equipment. Slab waveguides rms values were in order of only 2 nm.
    Original languageEnglish
    Title of host publicationIntegrated Optics and Photonic Integrated Circuits
    PublisherInternational Society for Optics and Photonics SPIE
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication
    EventPhotonics Europe 2004 - Strasbourg, France
    Duration: 26 Apr 200430 Apr 2004

    Publication series

    SeriesProceedings of SPIE


    ConferencePhotonics Europe 2004


    • hybrid materials
    • hybrid sol-gel
    • hybrid thin coatings
    • sol-gel
    • optical devices
    • optical equipment
    • optical materials
    • optical receivers
    • optical resonators
    • optical sensors


    Dive into the research topics of 'Photo-crosslinkable hybrid material with improved aging stability for integrated optics'. Together they form a unique fingerprint.

    Cite this