Photolithographic fabrication method of computer-generated holographic interferograms

Keyphrases

• Fabrication Methods 100%
• Photolithographic 100%
• Holographic Interferogram 100%
• Rectangle 100%
• Electron Beam Lithography 50%
• Hologram 50%
• Interferogram 50%
• Diffraction Pattern 50%
• Diffractive Optics 50%
• Step-and-repeat 50%
• Pattern Generator 50%
• Phase Transfer 50%
• Binary Phase 50%
• Diffraction Efficiency 50%
• Submicron Accuracy 50%

INIS

• fabrication 100%
• computers 100%
• holography 100%
• diffraction 66%
• values 33%
• efficiency 33%
• cameras 33%
• accuracy 33%
• resolution 33%
• electron beams 33%
• quantization 33%
• transfer functions 33%

Engineering

• Fabrication Method 100%
• Interferogram 100%
• Optical Element 33%
• Theoretical Value 33%
• Holograms 33%
• Pattern Generator 33%
• Electron Optical Lithography 33%
• Transfer Function 33%