Photonic devices based on silicon oxynitride and silicon-on-insulator waveguides

Timo Aalto, Pekka Katila, Päivi Heimala, Sanna Yliniemi

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 2000
    MoE publication typeNot Eligible
    EventNorthern Optics 2000, NO 2000 - Uppsala, Sweden
    Duration: 6 Jun 20008 Jun 2000

    Conference

    ConferenceNorthern Optics 2000, NO 2000
    CountrySweden
    CityUppsala
    Period6/06/008/06/00

    Cite this

    Aalto, T., Katila, P., Heimala, P., & Yliniemi, S. (2000). Photonic devices based on silicon oxynitride and silicon-on-insulator waveguides. Paper presented at Northern Optics 2000, NO 2000, Uppsala, Sweden.