Photonic integrated circuits

Matteo Cherchi; Timo Aalto; Mikko Harjanne

Photonic integrated circuits

Matteo Cherchi (Inventor)
, Timo Aalto (Inventor)
, Mikko Harjanne (Inventor)

BA6203 Silicon photonics

Research output: Patent › Patent

Abstract

According to an example aspect of the present invention, there is provided a photonic integrated circuit, comprising: a waveguide with an end having a tilted surface for reflecting light with a total internal reflection (TIR) mirror, and a functional surface for interacting with the light reflected by the TIR mirror, wherein the functional surface is directly deposited on to an antireflection coating on the waveguide. According to another aspect of the present invention there is provided a method for manufacturing a photonic integrated circuit.

Patent family as of 17.7.2026
EP4441539 A1, FI132087 B, FI20216226 A, US2025020863 AA, WO23099815 A1

Original language	English
Patent number	FI132087 B1
IPC	G01N21/00
Priority date	30/11/21
Filing date	30/11/21
Publication status	Published - 1 Jun 2026
MoE publication type	H1 Granted patent

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Cite this

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T1 - Photonic integrated circuits

AU - Cherchi, Matteo

AU - Aalto, Timo

AU - Harjanne, Mikko

PY - 2026/6/1

Y1 - 2026/6/1

N2 - According to an example aspect of the present invention, there is provided a photonic integrated circuit, comprising: a waveguide with an end having a tilted surface for reflecting light with a total internal reflection (TIR) mirror, and a functional surface for interacting with the light reflected by the TIR mirror, wherein the functional surface is directly deposited on to an antireflection coating on the waveguide. According to another aspect of the present invention there is provided a method for manufacturing a photonic integrated circuit. Patent family as of 17.7.2026 EP4441539 A1, FI132087 B, FI20216226 A, US2025020863 AA, WO23099815 A1

AB - According to an example aspect of the present invention, there is provided a photonic integrated circuit, comprising: a waveguide with an end having a tilted surface for reflecting light with a total internal reflection (TIR) mirror, and a functional surface for interacting with the light reflected by the TIR mirror, wherein the functional surface is directly deposited on to an antireflection coating on the waveguide. According to another aspect of the present invention there is provided a method for manufacturing a photonic integrated circuit. Patent family as of 17.7.2026 EP4441539 A1, FI132087 B, FI20216226 A, US2025020863 AA, WO23099815 A1

UR - https://fi.espacenet.com/publicationDetails/biblio?II=1&ND=3&adjacent=true&locale=fi_FI&FT=D&date=20250116&CC=US&NR=2025020863A1&KC=A1

M3 - Patent

M1 - FI132087 B1

Y2 - 2021/11/30

ER -

Photonic integrated circuits

Abstract

UN SDGs

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