Physical and Electrical Characterization of ALD Chalcogenide Materials for 3D Memory Applications

Vijay Narasimhan, V. Adinolfi, L. Cheng, Martin E. McBriarty, Mikko Utriainen, Feng Gao, Riikka, L. Puurunen, Karl Littau

Research output: Contribution to conferenceConference AbstractScientificpeer-review

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Physics & Astronomy