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Keyphrases
Structural Properties
100%
Scandium Oxide
100%
Piezoelectric Properties
100%
C-axis
100%
Aluminum Scandium Nitride (AlScN)
100%
Nitride Films
100%
Piezoelectric Response
40%
Piezoelectric Coefficient
40%
Aluminum Nitride Thin Film
40%
Scanning Electron Microscopy
20%
Film Structure
20%
X Ray Diffraction
20%
Nitrides
20%
Energy Harvesting System
20%
Energy Dispersive X-ray Spectroscopy
20%
MEMS Devices
20%
Work Process
20%
Intrinsic Stress
20%
Process-structure-property Relationship
20%
Transmission Electron Microscopy
20%
X-ray Transmission
20%
Rocking Curve
20%
Magnetron
20%
Sputter-deposited
20%
Transversal
20%
Pure Aluminum
20%
Partial Substitution
20%
RF Filter
20%
C-axis Texture
20%
Compositional Homogeneity
20%
Micropower
20%
Pulsed DC
20%
Wurtzite Structure
20%
Piezoelectric MEMS
20%
Sc Content
20%
200 Mm Wafers
20%
Microactuators
20%
INIS
aluminium
100%
thin films
100%
piezoelectricity
100%
scandium
100%
scandium nitrides
100%
films
83%
aluminium nitrides
50%
texture
33%
devices
33%
energy
33%
range
33%
width
16%
concentration
16%
scanning electron microscopy
16%
microstructure
16%
sensors
16%
transmission electron microscopy
16%
actuators
16%
magnetrons
16%
sputtering
16%
filters
16%
x-ray diffraction
16%
harvesting
16%
x-ray spectroscopy
16%
rocking curve
16%
Material Science
Structural Property
100%
Scandium
100%
Nitride Compound
100%
Piezoelectricity
100%
Aluminum
100%
Thin Films
100%
Film
71%
Aluminum Nitride
42%
Actuator
14%
Scanning Electron Microscopy
14%
X-Ray Diffraction
14%
Microelectromechanical System
14%
Transmission Electron Microscopy
14%
Energy-Dispersive X-Ray Spectroscopy
14%