Piezoelectric thin film materials for microelectromechanical systems

Andreas Vogl; Frode Tyholdt; Paul Muralt; Elmeri Österlund

Piezoelectric thin film materials for microelectromechanical systems

Andreas Vogl
, Frode Tyholdt
, Paul Muralt
, Elmeri Österlund

Not published at VTT

SINTEF Digital
Ecole Polytechnique Fédérale de Lausanne (EPFL)
Aalto University

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific

Abstract

This chapter will give a brief overview of the most important piezoelectric thin film materials will be given as well as deposition methods and equipment that is necessary for industrial manufacturing in a MEMS line. These main materials are aluminum nitride (AIN) and PZT. Zinc oxide (ZnO) is used for some specific applications only. Further thin film piezoelectric materials are investigated either for their lead-free nature or their potentially higher piezoelectric performance, some of which will be shortly presented.

Original language	English
Title of host publication	Handbook of silicon based MEMS materials and technologies
Publisher	Elsevier
Chapter	6.5
Pages	174-186
Edition	3
ISBN (Electronic)	9780128177877
ISBN (Print)	9780128177860
Publication status	Published - 2020
MoE publication type	B2 Part of a book or another research book

Cite this

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title = "Piezoelectric thin film materials for microelectromechanical systems",

abstract = "This chapter will give a brief overview of the most important piezoelectric thin film materials will be given as well as deposition methods and equipment that is necessary for industrial manufacturing in a MEMS line. These main materials are aluminum nitride (AIN) and PZT. Zinc oxide (ZnO) is used for some specific applications only. Further thin film piezoelectric materials are investigated either for their lead-free nature or their potentially higher piezoelectric performance, some of which will be shortly presented. ",

author = "Andreas Vogl and Frode Tyholdt and Paul Muralt and Elmeri {\"O}sterlund",

year = "2020",

language = "English",

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TY - CHAP

T1 - Piezoelectric thin film materials for microelectromechanical systems

AU - Vogl, Andreas

AU - Tyholdt, Frode

AU - Muralt, Paul

AU - Österlund, Elmeri

PY - 2020

Y1 - 2020

N2 - This chapter will give a brief overview of the most important piezoelectric thin film materials will be given as well as deposition methods and equipment that is necessary for industrial manufacturing in a MEMS line. These main materials are aluminum nitride (AIN) and PZT. Zinc oxide (ZnO) is used for some specific applications only. Further thin film piezoelectric materials are investigated either for their lead-free nature or their potentially higher piezoelectric performance, some of which will be shortly presented.

AB - This chapter will give a brief overview of the most important piezoelectric thin film materials will be given as well as deposition methods and equipment that is necessary for industrial manufacturing in a MEMS line. These main materials are aluminum nitride (AIN) and PZT. Zinc oxide (ZnO) is used for some specific applications only. Further thin film piezoelectric materials are investigated either for their lead-free nature or their potentially higher piezoelectric performance, some of which will be shortly presented.

UR - https://doi.org/10.1016/B978-0-12-817786-0.00006-2

M3 - Chapter or book article

SN - 9780128177860

SP - 174

EP - 186

BT - Handbook of silicon based MEMS materials and technologies

PB - Elsevier

ER -

Piezoelectric thin film materials for microelectromechanical systems

Abstract

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