Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

Jarkko Tuominen, J. Lappalainen, Jussi Hiltunen, Jyrki Ollila, V. Lantto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMs and Their Applications
Pages37-38
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
Duration: 1 Aug 20054 Aug 2005

Publication series

SeriesOptical MEMS, IEEE/LEOS International Conference on
ISSN2160-5033

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
CountryFinland
CityOulu
Period1/08/054/08/05

Cite this

Tuominen, J., Lappalainen, J., Hiltunen, J., Ollila, J., & Lantto, V. (2005). Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. In IEEE/LEOS International Conference on Optical MEMs and Their Applications (pp. 37-38). Optical MEMS, IEEE/LEOS International Conference on https://doi.org/10.1109/OMEMS.2005.1540064