Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

Jarkko Tuominen; J. Lappalainen; Jussi Hiltunen; Jyrki Ollila; V. Lantto

doi:10.1109/OMEMS.2005.1540064

Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

Jarkko Tuominen, J. Lappalainen, Jussi Hiltunen, Jyrki Ollila, V. Lantto

University of Oulu

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

Feasibility of a piezoelectric PZT unimorph thin-film actuator on silicon substrates for optical fiber alignment in hybrid photonic modules was investigated. Displacements up to 57 μm were achieved enabling adjustability of optical coupling efficiency.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Pages	37-38
DOIs	https://doi.org/10.1109/OMEMS.2005.1540064
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	IEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland Duration: 1 Aug 2005 → 4 Aug 2005

Publication series

Series	Optical MEMS, IEEE/LEOS International Conference on
ISSN	2160-5033

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Country/Territory	Finland
City	Oulu
Period	1/08/05 → 4/08/05

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10.1109/OMEMS.2005.1540064

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title = "Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules",

abstract = "Feasibility of a piezoelectric PZT unimorph thin-film actuator on silicon substrates for optical fiber alignment in hybrid photonic modules was investigated. Displacements up to 57 μm were achieved enabling adjustability of optical coupling efficiency.",

author = "Jarkko Tuominen and J. Lappalainen and Jussi Hiltunen and Jyrki Ollila and V. Lantto",

year = "2005",

doi = "10.1109/OMEMS.2005.1540064",

language = "English",

isbn = "978-0-7803-9278-6",

series = "Optical MEMS, IEEE/LEOS International Conference on",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

pages = "37--38",

booktitle = "IEEE/LEOS International Conference on Optical MEMs and Their Applications",

note = "IEEE/LEOS International Conference on Optical MEMs and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",

}

Tuominen, J, Lappalainen, J, Hiltunen, J , Ollila, J & Lantto, V 2005, Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. in IEEE/LEOS International Conference on Optical MEMs and Their Applications. Optical MEMS, IEEE/LEOS International Conference on, pp. 37-38, IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540064

Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. / Tuominen, Jarkko; Lappalainen, J.; Hiltunen, Jussi et al.
IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 37-38 (Optical MEMS, IEEE/LEOS International Conference on).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

AU - Tuominen, Jarkko

AU - Lappalainen, J.

AU - Hiltunen, Jussi

AU - Ollila, Jyrki

AU - Lantto, V.

PY - 2005

Y1 - 2005

N2 - Feasibility of a piezoelectric PZT unimorph thin-film actuator on silicon substrates for optical fiber alignment in hybrid photonic modules was investigated. Displacements up to 57 μm were achieved enabling adjustability of optical coupling efficiency.

AB - Feasibility of a piezoelectric PZT unimorph thin-film actuator on silicon substrates for optical fiber alignment in hybrid photonic modules was investigated. Displacements up to 57 μm were achieved enabling adjustability of optical coupling efficiency.

U2 - 10.1109/OMEMS.2005.1540064

DO - 10.1109/OMEMS.2005.1540064

M3 - Conference article in proceedings

SN - 978-0-7803-9278-6

T3 - Optical MEMS, IEEE/LEOS International Conference on

SP - 37

EP - 38

BT - IEEE/LEOS International Conference on Optical MEMs and Their Applications

T2 - IEEE/LEOS International Conference on Optical MEMs and Their Applications

Y2 - 1 August 2005 through 4 August 2005

ER -

Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

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