Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

Jarkko Tuominen, J. Lappalainen, Jussi Hiltunen, Jyrki Ollila, V. Lantto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMs and Their Applications
Pages37-38
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
Duration: 1 Aug 20054 Aug 2005

Publication series

SeriesOptical MEMS, IEEE/LEOS International Conference on
ISSN2160-5033

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
CountryFinland
CityOulu
Period1/08/054/08/05

Cite this

Tuominen, J., Lappalainen, J., Hiltunen, J., Ollila, J., & Lantto, V. (2005). Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. In IEEE/LEOS International Conference on Optical MEMs and Their Applications (pp. 37-38). Optical MEMS, IEEE/LEOS International Conference on https://doi.org/10.1109/OMEMS.2005.1540064
Tuominen, Jarkko ; Lappalainen, J. ; Hiltunen, Jussi ; Ollila, Jyrki ; Lantto, V. / Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. pp. 37-38 (Optical MEMS, IEEE/LEOS International Conference on).
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title = "Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules",
author = "Jarkko Tuominen and J. Lappalainen and Jussi Hiltunen and Jyrki Ollila and V. Lantto",
year = "2005",
doi = "10.1109/OMEMS.2005.1540064",
language = "English",
isbn = "0-7803-9278-7",
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pages = "37--38",
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Tuominen, J, Lappalainen, J, Hiltunen, J, Ollila, J & Lantto, V 2005, Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. in IEEE/LEOS International Conference on Optical MEMs and Their Applications. Optical MEMS, IEEE/LEOS International Conference on, pp. 37-38, IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540064

Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. / Tuominen, Jarkko; Lappalainen, J.; Hiltunen, Jussi; Ollila, Jyrki; Lantto, V.

IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 37-38 (Optical MEMS, IEEE/LEOS International Conference on).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

AU - Tuominen, Jarkko

AU - Lappalainen, J.

AU - Hiltunen, Jussi

AU - Ollila, Jyrki

AU - Lantto, V.

PY - 2005

Y1 - 2005

U2 - 10.1109/OMEMS.2005.1540064

DO - 10.1109/OMEMS.2005.1540064

M3 - Conference article in proceedings

SN - 0-7803-9278-7

T3 - Optical MEMS, IEEE/LEOS International Conference on

SP - 37

EP - 38

BT - IEEE/LEOS International Conference on Optical MEMs and Their Applications

ER -

Tuominen J, Lappalainen J, Hiltunen J, Ollila J, Lantto V. Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules. In IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 37-38. (Optical MEMS, IEEE/LEOS International Conference on). https://doi.org/10.1109/OMEMS.2005.1540064