Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules

Jarkko Tuominen, J. Lappalainen, Jussi Hiltunen, Jyrki Ollila, V. Lantto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationIEEE/LEOS International Conference on Optical MEMs and Their Applications
    Pages37-38
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
    Duration: 1 Aug 20054 Aug 2005

    Publication series

    SeriesOptical MEMS, IEEE/LEOS International Conference on
    ISSN2160-5033

    Conference

    ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
    Country/TerritoryFinland
    CityOulu
    Period1/08/054/08/05

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