Piezoelectric thin-film unimorph actuator for optical fibre alignment applications

Jarkko Tuominen (Corresponding Author), Jyrki Lappalainen, Jussi Hiltunen, Jyrki Ollila, Vilho Lantto

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Abstract

Feasibility of a piezoelectric unimorph thin-film actuator for optical fibre alignment was investigated. The main interest was focused on the fabrication, and electrical and mechanical characterization of a low-voltage driven component which was small-sized, efficient and suitable for integration into the low-temperature co-fired ceramic (LTCC) environment. Lead zirconate titanate (PZT) was chosen as ferroelectric thin-film material due to its excellent piezoelectric properties. A specific thin-film actuator structure was designed, modelled, and fabricated on silicon substrates. The structural, electrical and mechanical properties of the actuator structures were characterized, and the actuator structures were hybrid-integrated on LTCC substrates together with optical fibres to form a cantilever-type high-precision alignment device. Using a semiconductor laser diode as a light source, the alignment of an optical fibre was tested. Cantilever displacements up to 57 µm were achieved enabling adjustability of optical power coupling.
Original languageEnglish
Pages (from-to)S398-S404
Number of pages7
JournalJournal of Optics A: Pure and Applied Optics
Volume8
Issue number7
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Fingerprint

Optical fibers
Actuators
optical fibers
actuators
alignment
Thin films
thin films
Semiconductor lasers
semiconductor lasers
ceramics
Ferroelectric thin films
hybrid structures
Silicon
Substrates
low voltage
Light sources
Structural properties
light sources
Electric properties
electrical properties

Keywords

  • MEMS
  • microelectromechanical system
  • pulsed laser deposition
  • PZT
  • optical coupling
  • LTCC

Cite this

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title = "Piezoelectric thin-film unimorph actuator for optical fibre alignment applications",
abstract = "Feasibility of a piezoelectric unimorph thin-film actuator for optical fibre alignment was investigated. The main interest was focused on the fabrication, and electrical and mechanical characterization of a low-voltage driven component which was small-sized, efficient and suitable for integration into the low-temperature co-fired ceramic (LTCC) environment. Lead zirconate titanate (PZT) was chosen as ferroelectric thin-film material due to its excellent piezoelectric properties. A specific thin-film actuator structure was designed, modelled, and fabricated on silicon substrates. The structural, electrical and mechanical properties of the actuator structures were characterized, and the actuator structures were hybrid-integrated on LTCC substrates together with optical fibres to form a cantilever-type high-precision alignment device. Using a semiconductor laser diode as a light source, the alignment of an optical fibre was tested. Cantilever displacements up to 57 µm were achieved enabling adjustability of optical power coupling.",
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year = "2006",
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Piezoelectric thin-film unimorph actuator for optical fibre alignment applications. / Tuominen, Jarkko (Corresponding Author); Lappalainen, Jyrki; Hiltunen, Jussi; Ollila, Jyrki; Lantto, Vilho.

In: Journal of Optics A: Pure and Applied Optics, Vol. 8, No. 7, 2006, p. S398-S404.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Piezoelectric thin-film unimorph actuator for optical fibre alignment applications

AU - Tuominen, Jarkko

AU - Lappalainen, Jyrki

AU - Hiltunen, Jussi

AU - Ollila, Jyrki

AU - Lantto, Vilho

PY - 2006

Y1 - 2006

N2 - Feasibility of a piezoelectric unimorph thin-film actuator for optical fibre alignment was investigated. The main interest was focused on the fabrication, and electrical and mechanical characterization of a low-voltage driven component which was small-sized, efficient and suitable for integration into the low-temperature co-fired ceramic (LTCC) environment. Lead zirconate titanate (PZT) was chosen as ferroelectric thin-film material due to its excellent piezoelectric properties. A specific thin-film actuator structure was designed, modelled, and fabricated on silicon substrates. The structural, electrical and mechanical properties of the actuator structures were characterized, and the actuator structures were hybrid-integrated on LTCC substrates together with optical fibres to form a cantilever-type high-precision alignment device. Using a semiconductor laser diode as a light source, the alignment of an optical fibre was tested. Cantilever displacements up to 57 µm were achieved enabling adjustability of optical power coupling.

AB - Feasibility of a piezoelectric unimorph thin-film actuator for optical fibre alignment was investigated. The main interest was focused on the fabrication, and electrical and mechanical characterization of a low-voltage driven component which was small-sized, efficient and suitable for integration into the low-temperature co-fired ceramic (LTCC) environment. Lead zirconate titanate (PZT) was chosen as ferroelectric thin-film material due to its excellent piezoelectric properties. A specific thin-film actuator structure was designed, modelled, and fabricated on silicon substrates. The structural, electrical and mechanical properties of the actuator structures were characterized, and the actuator structures were hybrid-integrated on LTCC substrates together with optical fibres to form a cantilever-type high-precision alignment device. Using a semiconductor laser diode as a light source, the alignment of an optical fibre was tested. Cantilever displacements up to 57 µm were achieved enabling adjustability of optical power coupling.

KW - MEMS

KW - microelectromechanical system

KW - pulsed laser deposition

KW - PZT

KW - optical coupling

KW - LTCC

U2 - 10.1088/1464-4258/8/7/S17

DO - 10.1088/1464-4258/8/7/S17

M3 - Article

VL - 8

SP - S398-S404

JO - Journal of Optics

JF - Journal of Optics

SN - 2040-8978

IS - 7

ER -