Abstract
| Original language | English |
|---|---|
| Pages (from-to) | S398-S404 |
| Number of pages | 7 |
| Journal | Journal of Optics A: Pure and Applied Optics |
| Volume | 8 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 2006 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- MEMS
- microelectromechanical system
- pulsed laser deposition
- PZT
- optical coupling
- LTCC
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Piezoelectric thin-film unimorph actuator for optical fibre alignment applications. / Tuominen, Jarkko (Corresponding Author); Lappalainen, Jyrki; Hiltunen, Jussi; Ollila, Jyrki; Lantto, Vilho.
In: Journal of Optics A: Pure and Applied Optics, Vol. 8, No. 7, 2006, p. S398-S404.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Piezoelectric thin-film unimorph actuator for optical fibre alignment applications
AU - Tuominen, Jarkko
AU - Lappalainen, Jyrki
AU - Hiltunen, Jussi
AU - Ollila, Jyrki
AU - Lantto, Vilho
PY - 2006
Y1 - 2006
N2 - Feasibility of a piezoelectric unimorph thin-film actuator for optical fibre alignment was investigated. The main interest was focused on the fabrication, and electrical and mechanical characterization of a low-voltage driven component which was small-sized, efficient and suitable for integration into the low-temperature co-fired ceramic (LTCC) environment. Lead zirconate titanate (PZT) was chosen as ferroelectric thin-film material due to its excellent piezoelectric properties. A specific thin-film actuator structure was designed, modelled, and fabricated on silicon substrates. The structural, electrical and mechanical properties of the actuator structures were characterized, and the actuator structures were hybrid-integrated on LTCC substrates together with optical fibres to form a cantilever-type high-precision alignment device. Using a semiconductor laser diode as a light source, the alignment of an optical fibre was tested. Cantilever displacements up to 57 µm were achieved enabling adjustability of optical power coupling.
AB - Feasibility of a piezoelectric unimorph thin-film actuator for optical fibre alignment was investigated. The main interest was focused on the fabrication, and electrical and mechanical characterization of a low-voltage driven component which was small-sized, efficient and suitable for integration into the low-temperature co-fired ceramic (LTCC) environment. Lead zirconate titanate (PZT) was chosen as ferroelectric thin-film material due to its excellent piezoelectric properties. A specific thin-film actuator structure was designed, modelled, and fabricated on silicon substrates. The structural, electrical and mechanical properties of the actuator structures were characterized, and the actuator structures were hybrid-integrated on LTCC substrates together with optical fibres to form a cantilever-type high-precision alignment device. Using a semiconductor laser diode as a light source, the alignment of an optical fibre was tested. Cantilever displacements up to 57 µm were achieved enabling adjustability of optical power coupling.
KW - MEMS
KW - microelectromechanical system
KW - pulsed laser deposition
KW - PZT
KW - optical coupling
KW - LTCC
U2 - 10.1088/1464-4258/8/7/S17
DO - 10.1088/1464-4258/8/7/S17
M3 - Article
VL - 8
SP - S398-S404
JO - Journal of Optics
JF - Journal of Optics
SN - 2040-8978
IS - 7
ER -