Keyphrases
Piezoelectric Thin Film
100%
Optical Fiber Alignment
100%
Unimorph Actuator
100%
Actuator Structure
100%
Low Temperature Co-fired Ceramic
66%
Optical Fiber
66%
Thin-film Actuators
66%
Structural Properties
33%
Mechanical Properties
33%
Electrical Properties
33%
Cantilever
33%
Electrical Characterization
33%
Light Source
33%
Ceramic Substrate
33%
Silicon Substrate
33%
Low Voltage
33%
Mechanical Characterization
33%
Optical Power
33%
Semiconductor Lasers
33%
Voltage-driven
33%
Piezoelectric Properties
33%
Lead Zirconate Titanate
33%
Power Coupling
33%
Adjustability
33%
Piezoelectric Unimorph
33%
Alignment Device
33%
Hybrid Integration
33%
Small-sized
33%
Thin Film Materials
33%
Ferroelectric Thin Film
33%
Fast Alignment
33%
Cantilever Type
33%
INIS
applications
100%
thin films
100%
actuators
100%
alignment
100%
piezoelectricity
100%
optical fibers
100%
substrates
40%
low temperature
40%
ceramics
40%
environment
20%
hybrids
20%
devices
20%
silicon
20%
coupling
20%
power
20%
mechanical properties
20%
voltage
20%
electrical properties
20%
precision
20%
fabrication
20%
light sources
20%
semiconductor lasers
20%
ferroelectric materials
20%
pzt
20%
lead zirconate titanate
20%
Material Science
Actuator
100%
Piezoelectricity
100%
Thin Films
100%
Glass Fiber
100%
Low Temperature Co-Fired Ceramics
40%
Ceramic Substrate
20%
Mechanical Testing
20%
Laser Diode
20%
Ferroelectric Thin Films
20%
Semiconductor Laser
20%
Lead Zirconate Titanate
20%
Optical Power
20%
Silicon
20%
Piezoelectric Property
20%