Piezoelectric ultrasonic transducer and system

Cyril Karuthedath; T.S. Abhilash; Teuvo Sillanpää; Tuomas Pensala

Piezoelectric ultrasonic transducer and system

Cyril Karuthedath (Inventor), T.S. Abhilash (Inventor), Teuvo Sillanpää (Inventor), Tuomas Pensala (Inventor)

BA6201 MEMS

Research output: Patent › Patent application

Abstract

There is provided an ultrasonic transducer configured to provide passive temperature compensation for a stable operation over a wide bandwidth. The ultrasonic transducer comprises a cavity for communications of ultrasonic waves and a membrane supported movable between walls of the cavity. The membrane comprises a structural layer on a side of the membrane towards the cavity and a piezoelectric layer attached to the structural layer on an opposite side of the membrane with respect to the cavity. Temperature coefficients of Young's modulus of the structural layer and the piezoelectric layer have opposite signs for passive temperature compensation of operating frequency of the piezoelectric ultrasonic transducer.

Patent family as of 10.1.2024
EP4240540 A1 20230913 EP20210810649 20211108
FI20206130 A 20220510 FI20200006130 20201109
US2023415198 AA 20231228 US20230035892 20211108
WO22096790 A1 20220512 WO2021FI50755 20211108

Original language	English
Patent number	US20230415198 A1
Priority date	9/11/20
Filing date	8/11/21
Publication status	Published - 28 Dec 2023
MoE publication type	Not Eligible

Access to Document

https://patents.google.com/patent/US20230415198A1/en

Cite this

@misc{88e28b20f68c47c1939eceb784140d9a,

title = "Piezoelectric ultrasonic transducer and system",

abstract = "There is provided an ultrasonic transducer configured to provide passive temperature compensation for a stable operation over a wide bandwidth. The ultrasonic transducer comprises a cavity for communications of ultrasonic waves and a membrane supported movable between walls of the cavity. The membrane comprises a structural layer on a side of the membrane towards the cavity and a piezoelectric layer attached to the structural layer on an opposite side of the membrane with respect to the cavity. Temperature coefficients of Young's modulus of the structural layer and the piezoelectric layer have opposite signs for passive temperature compensation of operating frequency of the piezoelectric ultrasonic transducer.Patent family as of 10.1.2024EP4240540 A1 20230913 EP20210810649 20211108FI20206130 A 20220510 FI20200006130 20201109US2023415198 AA 20231228 US20230035892 20211108WO22096790 A1 20220512 WO2021FI50755 20211108",

author = "Cyril Karuthedath and T.S. Abhilash and Teuvo Sillanp{\"a}{\"a} and Tuomas Pensala",

year = "2023",

month = dec,

day = "28",

language = "English",

type = "Patent",

note = "US20230415198 A1",

}

TY - PAT

T1 - Piezoelectric ultrasonic transducer and system

AU - Karuthedath, Cyril

AU - Abhilash, T.S.

AU - Sillanpää, Teuvo

AU - Pensala, Tuomas

PY - 2023/12/28

Y1 - 2023/12/28

N2 - There is provided an ultrasonic transducer configured to provide passive temperature compensation for a stable operation over a wide bandwidth. The ultrasonic transducer comprises a cavity for communications of ultrasonic waves and a membrane supported movable between walls of the cavity. The membrane comprises a structural layer on a side of the membrane towards the cavity and a piezoelectric layer attached to the structural layer on an opposite side of the membrane with respect to the cavity. Temperature coefficients of Young's modulus of the structural layer and the piezoelectric layer have opposite signs for passive temperature compensation of operating frequency of the piezoelectric ultrasonic transducer.Patent family as of 10.1.2024EP4240540 A1 20230913 EP20210810649 20211108FI20206130 A 20220510 FI20200006130 20201109US2023415198 AA 20231228 US20230035892 20211108WO22096790 A1 20220512 WO2021FI50755 20211108

AB - There is provided an ultrasonic transducer configured to provide passive temperature compensation for a stable operation over a wide bandwidth. The ultrasonic transducer comprises a cavity for communications of ultrasonic waves and a membrane supported movable between walls of the cavity. The membrane comprises a structural layer on a side of the membrane towards the cavity and a piezoelectric layer attached to the structural layer on an opposite side of the membrane with respect to the cavity. Temperature coefficients of Young's modulus of the structural layer and the piezoelectric layer have opposite signs for passive temperature compensation of operating frequency of the piezoelectric ultrasonic transducer.Patent family as of 10.1.2024EP4240540 A1 20230913 EP20210810649 20211108FI20206130 A 20220510 FI20200006130 20201109US2023415198 AA 20231228 US20230035892 20211108WO22096790 A1 20220512 WO2021FI50755 20211108

UR - https://worldwide.espacenet.com/patent/search/family/078695723/publication/US2023415198A1?q=US20230415198

M3 - Patent

M1 - US20230415198 A1

Y2 - 2021/11/08

ER -

Piezoelectric ultrasonic transducer and system

Abstract

Access to Document

Other files and links

Fingerprint

Cite this