Piezoelectrically actuated micromechanical BAW resonators

P. Rosenberg, A. Jaakkola, J. Dekker, A. Nurmela, A. Pensala, S. Asmala, T. Riekkinen, T. Mattila, A. Alastalo

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages2181-2184
Number of pages4
ISBN (Electronic)978-1-4244-2480-1
ISBN (Print)978-1-4244-2428-3
DOIs
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008

Conference

ConferenceIEEE Ultrasonics Symposium
CountryChina
CityBeijing
Period2/11/085/11/08

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