Piezoelectrically actuated micromechanical BAW resonators

P. Rosenberg, A. Jaakkola, J. Dekker, A. Nurmela, A. Pensala, S. Asmala, T. Riekkinen, T. Mattila, A. Alastalo

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages2181-2184
Number of pages4
ISBN (Electronic)978-1-4244-2480-1
ISBN (Print)978-1-4244-2428-3
DOIs
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008

Conference

ConferenceIEEE Ultrasonics Symposium
CountryChina
CityBeijing
Period2/11/085/11/08

Cite this

Rosenberg, P., Jaakkola, A., Dekker, J., Nurmela, A., Pensala, A., Asmala, S., ... Alastalo, A. (2008). Piezoelectrically actuated micromechanical BAW resonators. In Proceedings - IEEE Ultrasonics Symposium (pp. 2181-2184). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ULTSYM.2008.0540
Rosenberg, P. ; Jaakkola, A. ; Dekker, J. ; Nurmela, A. ; Pensala, A. ; Asmala, S. ; Riekkinen, T. ; Mattila, T. ; Alastalo, A. / Piezoelectrically actuated micromechanical BAW resonators. Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE, 2008. pp. 2181-2184
@inproceedings{20338bc85f16436b8081d6efeaa4915e,
title = "Piezoelectrically actuated micromechanical BAW resonators",
author = "P. Rosenberg and A. Jaakkola and J. Dekker and A. Nurmela and A. Pensala and S. Asmala and T. Riekkinen and T. Mattila and A. Alastalo",
year = "2008",
doi = "10.1109/ULTSYM.2008.0540",
language = "English",
isbn = "978-1-4244-2428-3",
pages = "2181--2184",
booktitle = "Proceedings - IEEE Ultrasonics Symposium",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
address = "United States",

}

Rosenberg, P, Jaakkola, A, Dekker, J, Nurmela, A, Pensala, A, Asmala, S, Riekkinen, T, Mattila, T & Alastalo, A 2008, Piezoelectrically actuated micromechanical BAW resonators. in Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE, pp. 2181-2184, IEEE Ultrasonics Symposium, Beijing, China, 2/11/08. https://doi.org/10.1109/ULTSYM.2008.0540

Piezoelectrically actuated micromechanical BAW resonators. / Rosenberg, P.; Jaakkola, A.; Dekker, J.; Nurmela, A.; Pensala, A.; Asmala, S.; Riekkinen, T.; Mattila, T.; Alastalo, A.

Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE, 2008. p. 2181-2184.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Piezoelectrically actuated micromechanical BAW resonators

AU - Rosenberg, P.

AU - Jaakkola, A.

AU - Dekker, J.

AU - Nurmela, A.

AU - Pensala, A.

AU - Asmala, S.

AU - Riekkinen, T.

AU - Mattila, T.

AU - Alastalo, A.

PY - 2008

Y1 - 2008

U2 - 10.1109/ULTSYM.2008.0540

DO - 10.1109/ULTSYM.2008.0540

M3 - Conference article in proceedings

SN - 978-1-4244-2428-3

SP - 2181

EP - 2184

BT - Proceedings - IEEE Ultrasonics Symposium

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Rosenberg P, Jaakkola A, Dekker J, Nurmela A, Pensala A, Asmala S et al. Piezoelectrically actuated micromechanical BAW resonators. In Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE. 2008. p. 2181-2184 https://doi.org/10.1109/ULTSYM.2008.0540