Piezoelectrically actuated micromechanical BAW resonators

P. Rosenberg, A. Jaakkola, J. Dekker, A. Nurmela, A. Pensala, S. Asmala, T. Riekkinen, T. Mattila, A. Alastalo

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    7 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings - IEEE Ultrasonics Symposium
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages2181-2184
    Number of pages4
    ISBN (Electronic)978-1-4244-2480-1
    ISBN (Print)978-1-4244-2428-3
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication
    EventIEEE Ultrasonics Symposium - Beijing, China
    Duration: 2 Nov 20085 Nov 2008

    Conference

    ConferenceIEEE Ultrasonics Symposium
    CountryChina
    CityBeijing
    Period2/11/085/11/08

    Cite this