Piezoelectrically actuated micromechanical BAW resonators

P. Rosenberg, A. Jaakkola, J. Dekker, A. Nurmela, A. Pensala, S. Asmala, T. Riekkinen, T. Mattila, A. Alastalo

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages4
ISBN (Electronic)978-1-4244-2480-1
ISBN (Print)978-1-4244-2428-3
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008


ConferenceIEEE Ultrasonics Symposium

Cite this

Rosenberg, P., Jaakkola, A., Dekker, J., Nurmela, A., Pensala, A., Asmala, S., Riekkinen, T., Mattila, T., & Alastalo, A. (2008). Piezoelectrically actuated micromechanical BAW resonators. In Proceedings - IEEE Ultrasonics Symposium (pp. 2181-2184). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ULTSYM.2008.0540