Piezoelectrically actuated micromechanical BAW resonators

P. Rosenberg; A. Jaakkola; J. Dekker; A. Nurmela; A. Pensala; S. Asmala; T. Riekkinen; T. Mattila; A. Alastalo

doi:10.1109/ULTSYM.2008.0540

Piezoelectrically actuated micromechanical BAW resonators

P. Rosenberg
, A. Jaakkola
, J. Dekker
, A. Nurmela
, A. Pensala
, S. Asmala
, T. Riekkinen
, T. Mattila
, A. Alastalo

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

7 Citations (Scopus)

Original language	English
Title of host publication	Proceedings - IEEE Ultrasonics Symposium
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	2181-2184
Number of pages	4
ISBN (Electronic)	978-1-4244-2480-1
ISBN (Print)	978-1-4244-2428-3
DOIs	https://doi.org/10.1109/ULTSYM.2008.0540
Publication status	Published - 2008
MoE publication type	A4 Article in a conference publication
Event	IEEE Ultrasonics Symposium - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008

Conference

Conference	IEEE Ultrasonics Symposium
Country/Territory	China
City	Beijing
Period	2/11/08 → 5/11/08

Access to Document

10.1109/ULTSYM.2008.0540

https://www.scopus.com/inward/record.uri?eid=2-s2.0-67649307398&doi=10.1109%2fULTSYM.2008.0540&partnerID=40&md5=ab659e846e3c9fba837ab05be6485f8e

Cite this

@inproceedings{20338bc85f16436b8081d6efeaa4915e,

title = "Piezoelectrically actuated micromechanical BAW resonators",

author = "P. Rosenberg and A. Jaakkola and J. Dekker and A. Nurmela and A. Pensala and S. Asmala and T. Riekkinen and T. Mattila and A. Alastalo",

year = "2008",

doi = "10.1109/ULTSYM.2008.0540",

language = "English",

isbn = "978-1-4244-2428-3 ",

pages = "2181--2184",

booktitle = "Proceedings - IEEE Ultrasonics Symposium",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "IEEE Ultrasonics Symposium ; Conference date: 02-11-2008 Through 05-11-2008",

}

Rosenberg, P, Jaakkola, A, Dekker, J, Nurmela, A, Pensala, A, Asmala, S, Riekkinen, T, Mattila, T & Alastalo, A 2008, Piezoelectrically actuated micromechanical BAW resonators. in Proceedings - IEEE Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, pp. 2181-2184, IEEE Ultrasonics Symposium, Beijing, China, 2/11/08. https://doi.org/10.1109/ULTSYM.2008.0540

TY - GEN

T1 - Piezoelectrically actuated micromechanical BAW resonators

AU - Rosenberg, P.

AU - Jaakkola, A.

AU - Dekker, J.

AU - Nurmela, A.

AU - Pensala, A.

AU - Asmala, S.

AU - Riekkinen, T.

AU - Mattila, T.

AU - Alastalo, A.

PY - 2008

Y1 - 2008

U2 - 10.1109/ULTSYM.2008.0540

DO - 10.1109/ULTSYM.2008.0540

M3 - Conference article in proceedings

SN - 978-1-4244-2428-3

SP - 2181

EP - 2184

BT - Proceedings - IEEE Ultrasonics Symposium

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE Ultrasonics Symposium

Y2 - 2 November 2008 through 5 November 2008

ER -