Piezoelectrically transduced single-crystal-silicon plate resonators

A. Jaakkola, P. Rosenberg, S. Asmala, A. Nurmela, T. Pensala, T. Riekkinen, J. Dekker, T. Mattila, A. Alastalo, O. Holmgren, K. Kokkonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

29 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages717-720
Number of pages4
ISBN (Electronic)978-1-4244-2480-1
ISBN (Print)978-1-4244-2428-3
DOIs
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008

Conference

ConferenceIEEE Ultrasonics Symposium
CountryChina
CityBeijing
Period2/11/085/11/08

Cite this

Jaakkola, A., Rosenberg, P., Asmala, S., Nurmela, A., Pensala, T., Riekkinen, T., ... Kokkonen, K. (2008). Piezoelectrically transduced single-crystal-silicon plate resonators. In Proceedings - IEEE Ultrasonics Symposium (pp. 717-720). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ULTSYM.2008.0171
Jaakkola, A. ; Rosenberg, P. ; Asmala, S. ; Nurmela, A. ; Pensala, T. ; Riekkinen, T. ; Dekker, J. ; Mattila, T. ; Alastalo, A. ; Holmgren, O. ; Kokkonen, K. / Piezoelectrically transduced single-crystal-silicon plate resonators. Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE, 2008. pp. 717-720
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title = "Piezoelectrically transduced single-crystal-silicon plate resonators",
author = "A. Jaakkola and P. Rosenberg and S. Asmala and A. Nurmela and T. Pensala and T. Riekkinen and J. Dekker and T. Mattila and A. Alastalo and O. Holmgren and K. Kokkonen",
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doi = "10.1109/ULTSYM.2008.0171",
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Jaakkola, A, Rosenberg, P, Asmala, S, Nurmela, A, Pensala, T, Riekkinen, T, Dekker, J, Mattila, T, Alastalo, A, Holmgren, O & Kokkonen, K 2008, Piezoelectrically transduced single-crystal-silicon plate resonators. in Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE, pp. 717-720, IEEE Ultrasonics Symposium, Beijing, China, 2/11/08. https://doi.org/10.1109/ULTSYM.2008.0171

Piezoelectrically transduced single-crystal-silicon plate resonators. / Jaakkola, A.; Rosenberg, P.; Asmala, S.; Nurmela, A.; Pensala, T.; Riekkinen, T.; Dekker, J.; Mattila, T.; Alastalo, A.; Holmgren, O.; Kokkonen, K.

Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE, 2008. p. 717-720.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Piezoelectrically transduced single-crystal-silicon plate resonators

AU - Jaakkola, A.

AU - Rosenberg, P.

AU - Asmala, S.

AU - Nurmela, A.

AU - Pensala, T.

AU - Riekkinen, T.

AU - Dekker, J.

AU - Mattila, T.

AU - Alastalo, A.

AU - Holmgren, O.

AU - Kokkonen, K.

PY - 2008

Y1 - 2008

U2 - 10.1109/ULTSYM.2008.0171

DO - 10.1109/ULTSYM.2008.0171

M3 - Conference article in proceedings

SN - 978-1-4244-2428-3

SP - 717

EP - 720

BT - Proceedings - IEEE Ultrasonics Symposium

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Jaakkola A, Rosenberg P, Asmala S, Nurmela A, Pensala T, Riekkinen T et al. Piezoelectrically transduced single-crystal-silicon plate resonators. In Proceedings - IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE. 2008. p. 717-720 https://doi.org/10.1109/ULTSYM.2008.0171