Piezoelectrically transduced single-crystal-silicon plate resonators

A. Jaakkola; P. Rosenberg; S. Asmala; A. Nurmela; T. Pensala; T. Riekkinen; J. Dekker; T. Mattila; A. Alastalo; O. Holmgren; K. Kokkonen

doi:10.1109/ULTSYM.2008.0171

Piezoelectrically transduced single-crystal-silicon plate resonators

A. Jaakkola, P. Rosenberg, S. Asmala, A. Nurmela, T. Pensala, T. Riekkinen, J. Dekker, T. Mattila, A. Alastalo, O. Holmgren, K. Kokkonen

Helsinki University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

32 Citations (Scopus)

Original language	English
Title of host publication	Proceedings - IEEE Ultrasonics Symposium
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	717-720
Number of pages	4
ISBN (Electronic)	978-1-4244-2480-1
ISBN (Print)	978-1-4244-2428-3
DOIs	https://doi.org/10.1109/ULTSYM.2008.0171
Publication status	Published - 2008
MoE publication type	A4 Article in a conference publication
Event	IEEE Ultrasonics Symposium - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008

Conference

Conference	IEEE Ultrasonics Symposium
Country/Territory	China
City	Beijing
Period	2/11/08 → 5/11/08

Access to Document

10.1109/ULTSYM.2008.0171

https://www.scopus.com/inward/record.uri?eid=2-s2.0-67649312571&doi=10.1109%2fULTSYM.2008.0171&partnerID=40&md5=b053f950a56ab0965d618f3a8e1c475d

Cite this

Jaakkola, A., Rosenberg, P., Asmala, S., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T., Alastalo, A., Holmgren, O., & Kokkonen, K. (2008). Piezoelectrically transduced single-crystal-silicon plate resonators. In Proceedings - IEEE Ultrasonics Symposium (pp. 717-720). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ULTSYM.2008.0171

@inproceedings{f24f4e69c3c04453979c08cd42d0c0c0,

title = "Piezoelectrically transduced single-crystal-silicon plate resonators",

author = "A. Jaakkola and P. Rosenberg and S. Asmala and A. Nurmela and T. Pensala and T. Riekkinen and J. Dekker and T. Mattila and A. Alastalo and O. Holmgren and K. Kokkonen",

year = "2008",

doi = "10.1109/ULTSYM.2008.0171",

language = "English",

isbn = "978-1-4244-2428-3",

pages = "717--720",

booktitle = "Proceedings - IEEE Ultrasonics Symposium",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "IEEE Ultrasonics Symposium ; Conference date: 02-11-2008 Through 05-11-2008",

}

Jaakkola, A, Rosenberg, P, Asmala, S, Nurmela, A, Pensala, T, Riekkinen, T, Dekker, J , Mattila, T , Alastalo, A, Holmgren, O & Kokkonen, K 2008, Piezoelectrically transduced single-crystal-silicon plate resonators. in Proceedings - IEEE Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, pp. 717-720, IEEE Ultrasonics Symposium, Beijing, China, 2/11/08. https://doi.org/10.1109/ULTSYM.2008.0171

TY - GEN

T1 - Piezoelectrically transduced single-crystal-silicon plate resonators

AU - Jaakkola, A.

AU - Rosenberg, P.

AU - Asmala, S.

AU - Nurmela, A.

AU - Pensala, T.

AU - Riekkinen, T.

AU - Dekker, J.

AU - Mattila, T.

AU - Alastalo, A.

AU - Holmgren, O.

AU - Kokkonen, K.

PY - 2008

Y1 - 2008

U2 - 10.1109/ULTSYM.2008.0171

DO - 10.1109/ULTSYM.2008.0171

M3 - Conference article in proceedings

SN - 978-1-4244-2428-3

SP - 717

EP - 720

BT - Proceedings - IEEE Ultrasonics Symposium

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE Ultrasonics Symposium

Y2 - 2 November 2008 through 5 November 2008

ER -