Piezoelectrically transduced single-crystal-silicon plate resonators

A. Jaakkola, P. Rosenberg, S. Asmala, A. Nurmela, T. Pensala, T. Riekkinen, J. Dekker, T. Mattila, A. Alastalo, O. Holmgren, K. Kokkonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

29 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages4
ISBN (Electronic)978-1-4244-2480-1
ISBN (Print)978-1-4244-2428-3
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008


ConferenceIEEE Ultrasonics Symposium

Cite this

Jaakkola, A., Rosenberg, P., Asmala, S., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T., Alastalo, A., Holmgren, O., & Kokkonen, K. (2008). Piezoelectrically transduced single-crystal-silicon plate resonators. In Proceedings - IEEE Ultrasonics Symposium (pp. 717-720). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ULTSYM.2008.0171