Keyphrases
Resonator
100%
Frequency Reference
100%
Silicon Resonator
100%
Temperature Compensated
100%
Reference Application
100%
Timing Reference
100%
Compensated Silicon
100%
Quartz Crystal
50%
Silica
33%
Frequency Stability
33%
Resonant Mode
33%
Elastic Parameters
33%
Degenerate Doping
33%
Electronic Devices
16%
Micro-electro-mechanical Systems
16%
Phase Noise
16%
Order of Magnitude
16%
Temperature Range
16%
Wireless Communication
16%
Temperature Variation
16%
Design Rules
16%
Small Devices
16%
Temperature Compensation
16%
Coupling Mechanism
16%
Resonant Frequency
16%
Extensional Mode
16%
Doping Level
16%
Piezoelectric Thin Film
16%
Electromechanical Transduction
16%
Reference Signal
16%
Resonator Design
16%
Subharmonics
16%
Oscillator Basis
16%
Temperature Characteristics
16%
DC Bias
16%
Electrostatic Coupling
16%
Micro-electro-mechanical Systems Technology
16%
Device Sizing
16%
Main Resonance
16%
Nonlinear Coupling
16%
Coupling Effect
16%
Mechanical Resonator
16%
Second-Order Temperature Compensation
16%
Reference Oscillator
16%
INIS
applications
100%
silicon
100%
resonators
100%
quartz
35%
design
21%
coupling
21%
resonance
21%
crystals
21%
oscillators
21%
levels
14%
devices
14%
stability
14%
microelectromechanical systems
14%
prediction
14%
fabrication
14%
mhz range
14%
cost
7%
width
7%
optimization
7%
size
7%
modeling
7%
temperature dependence
7%
electronic equipment
7%
variations
7%
range
7%
thin films
7%
noise
7%
nonlinear problems
7%
yields
7%
signals
7%
dimensions
7%
extrapolation
7%
frequency range
7%
temperature range
7%
electrostatics
7%
carriers
7%
khz range
7%
piezoelectricity
7%
anchors
7%
Engineering
Frequency Reference
100%
Resonator
100%
Quartz Crystal
21%
Resonance Mode
14%
Microelectromechanical System
14%
Silicon Dioxide
14%
Oscillator
14%
Temperature Range
7%
Design Rule
7%
Phase Noise
7%
System Technology
7%
Piezoelectric
7%
Resonance Frequency
7%
Reference Signal
7%
Doping Level
7%
Coupling Effect
7%
Wireless Communication
7%
Thin Films
7%
Material Science
Silicon
100%
Resonator
100%
Oscillator
21%
Microelectromechanical System
14%
Piezoelectricity
7%
Thin Films
7%