PiezoMEMS at VTT: R&D and manufacturing services

Research output: Contribution to conferenceConference articleProfessional

Abstract

VTT is an R&D institute with a staff of researchers and engineers developing new sensors and their fabrication processes across a wide range of platforms, from MEMS to photonics and detectors up to data analytics and digital services. Currently at the head of MEMS development, piezoelectric actuation drives resonators for timing, gyroscopes, and even mirrors for automotive LIDAR. Coupled with our new developments in highly-doped silicon, including CSOI substrates, we again see the possibilities of MEMS entering some long-promised territories. The development work for MEMS products in particular still occurs on many levels, sometimes requiring customization of existing processes, and sometimes the creation of entirely new processes. Formerly these processes, like the CSOI processes developed here previously, were transferred to distant foundries for production. Now, with our new partner VTT MEMSFAB, the scope of our development efforts, whenever realistic, has expanded to include manufacturing with the goal being to enable direct production of high-value components with achievable volumes and eliminate the costs associated with transferring to another production foundry.
Original languageEnglish
Number of pages42
Publication statusPublished - 2017
MoE publication typeNot Eligible
EventMEMS & Sensors Executive Congress
- San Jose, United States
Duration: 1 Nov 20172 Nov 2017

Conference

ConferenceMEMS & Sensors Executive Congress
CountryUnited States
CitySan Jose
Period1/11/172/11/17

Fingerprint

silicon
manufacturing
sensor
substrate
cost
detector
product
services

Keywords

  • MEMS
  • Piezo-MEMS
  • sensors

Cite this

Dekker, J., & Pensala, T. (2017). PiezoMEMS at VTT: R&D and manufacturing services. Paper presented at MEMS & Sensors Executive Congress
, San Jose, United States.
Dekker, James ; Pensala, Tuomas. / PiezoMEMS at VTT : R&D and manufacturing services. Paper presented at MEMS & Sensors Executive Congress
, San Jose, United States.42 p.
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Dekker, J & Pensala, T 2017, 'PiezoMEMS at VTT: R&D and manufacturing services', Paper presented at MEMS & Sensors Executive Congress
, San Jose, United States, 1/11/17 - 2/11/17.

PiezoMEMS at VTT : R&D and manufacturing services. / Dekker, James; Pensala, Tuomas.

2017. Paper presented at MEMS & Sensors Executive Congress
, San Jose, United States.

Research output: Contribution to conferenceConference articleProfessional

TY - CONF

T1 - PiezoMEMS at VTT

T2 - R&D and manufacturing services

AU - Dekker, James

AU - Pensala, Tuomas

PY - 2017

Y1 - 2017

N2 - VTT is an R&D institute with a staff of researchers and engineers developing new sensors and their fabrication processes across a wide range of platforms, from MEMS to photonics and detectors up to data analytics and digital services. Currently at the head of MEMS development, piezoelectric actuation drives resonators for timing, gyroscopes, and even mirrors for automotive LIDAR. Coupled with our new developments in highly-doped silicon, including CSOI substrates, we again see the possibilities of MEMS entering some long-promised territories. The development work for MEMS products in particular still occurs on many levels, sometimes requiring customization of existing processes, and sometimes the creation of entirely new processes. Formerly these processes, like the CSOI processes developed here previously, were transferred to distant foundries for production. Now, with our new partner VTT MEMSFAB, the scope of our development efforts, whenever realistic, has expanded to include manufacturing with the goal being to enable direct production of high-value components with achievable volumes and eliminate the costs associated with transferring to another production foundry.

AB - VTT is an R&D institute with a staff of researchers and engineers developing new sensors and their fabrication processes across a wide range of platforms, from MEMS to photonics and detectors up to data analytics and digital services. Currently at the head of MEMS development, piezoelectric actuation drives resonators for timing, gyroscopes, and even mirrors for automotive LIDAR. Coupled with our new developments in highly-doped silicon, including CSOI substrates, we again see the possibilities of MEMS entering some long-promised territories. The development work for MEMS products in particular still occurs on many levels, sometimes requiring customization of existing processes, and sometimes the creation of entirely new processes. Formerly these processes, like the CSOI processes developed here previously, were transferred to distant foundries for production. Now, with our new partner VTT MEMSFAB, the scope of our development efforts, whenever realistic, has expanded to include manufacturing with the goal being to enable direct production of high-value components with achievable volumes and eliminate the costs associated with transferring to another production foundry.

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KW - Piezo-MEMS

KW - sensors

M3 - Conference article

ER -

Dekker J, Pensala T. PiezoMEMS at VTT: R&D and manufacturing services. 2017. Paper presented at MEMS & Sensors Executive Congress
, San Jose, United States.