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Piezoresistive Platinum Diselenide Pressure Sensors with Reliable High Sensitivity and Their Integration into Complementary Metal-Oxide-Semiconductor Circuits

  • Sebastian Lukas
  • , Nico Rademacher
  • , Sofía Cruces
  • , Michael Gross
  • , Eva Desgué
  • , Stefan Heiserer
  • , Nikolas Dominik
  • , Maximilian Prechtl
  • , Oliver Hartwig
  • , Cormac Ó Coileáin
  • , Tanja Stimpel-Lindner
  • , Pierre Legagneux
  • , Arto Rantala
  • , Juha Matti Saari
  • , Miika Soikkeli
  • , Georg S. Duesberg
  • , Max C. Lemme*
  • *Corresponding author for this work
  • RWTH Aachen University
  • Gesellschaft für Angewandte Mikro- und Optoelektronik mbH
  • Thales Group
  • Bundeswehr University Munich

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