Piezotransduced single-crystal silicon BAW resonators

A. Jaakkola, P. Rosenberg, A. Nurmela, T. Pensala, T. Riekkinen, J. Dekker, T. Mattila, A. Alastalo

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    17 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Piezotransduced single-crystal silicon BAW resonators'. Together they form a unique fingerprint.

    Physics

    Engineering