PillarHall LHAR structure for thin film conformality measurements

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 14 May 2018
MoE publication typeNot Eligible
EventWorkshop on Reference Nanomaterials: Current situation and needs: development, measurement, standardization - PTB, Berlin-Adlershof BESSY II, Berlin, Germany
Duration: 14 May 201815 Jan 2019
https://www.ptb.de/cms/en/ptb/fachabteilungen/abt5/dates/nanoworkshop2018.html

Conference

ConferenceWorkshop on Reference Nanomaterials
CountryGermany
CityBerlin
Period14/05/1815/01/19
Internet address

Cite this

Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F., & Puurunen, R. L. (2018). PillarHall LHAR structure for thin film conformality measurements. Abstract from Workshop on Reference Nanomaterials, Berlin, Germany.