PillarHall LHAR structure for thin film conformality measurements

Virpi Korpelainen, Oili Ylivaara, Markku Ylilammi, Mikko Utriainen, Feng Gao, Riikka L. Puurunen

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 14 May 2018
MoE publication typeNot Eligible
EventWorkshop on Reference Nanomaterials: Current situation and needs: development, measurement, standardization - PTB, Berlin-Adlershof BESSY II, Berlin, Germany
Duration: 14 May 201815 Jan 2019
https://www.ptb.de/cms/en/ptb/fachabteilungen/abt5/dates/nanoworkshop2018.html

Conference

ConferenceWorkshop on Reference Nanomaterials
CountryGermany
CityBerlin
Period14/05/1815/01/19
Internet address

Cite this

Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F., & Puurunen, R. L. (2018). PillarHall LHAR structure for thin film conformality measurements. Abstract from Workshop on Reference Nanomaterials, Berlin, Germany.
Korpelainen, Virpi ; Ylivaara, Oili ; Ylilammi, Markku ; Utriainen, Mikko ; Gao, Feng ; Puurunen, Riikka L. / PillarHall LHAR structure for thin film conformality measurements. Abstract from Workshop on Reference Nanomaterials, Berlin, Germany.
@conference{d205c18245794567bb3cefb1d12a774b,
title = "PillarHall LHAR structure for thin film conformality measurements",
author = "Virpi Korpelainen and Oili Ylivaara and Markku Ylilammi and Mikko Utriainen and Feng Gao and Puurunen, {Riikka L.}",
note = "Poster presentation, abstract reviewed; Workshop on Reference Nanomaterials : Current situation and needs: development, measurement, standardization ; Conference date: 14-05-2018 Through 15-01-2019",
year = "2018",
month = "5",
day = "14",
language = "English",
url = "https://www.ptb.de/cms/en/ptb/fachabteilungen/abt5/dates/nanoworkshop2018.html",

}

Korpelainen, V, Ylivaara, O, Ylilammi, M, Utriainen, M, Gao, F & Puurunen, RL 2018, 'PillarHall LHAR structure for thin film conformality measurements' Workshop on Reference Nanomaterials, Berlin, Germany, 14/05/18 - 15/01/19, .

PillarHall LHAR structure for thin film conformality measurements. / Korpelainen, Virpi; Ylivaara, Oili; Ylilammi, Markku; Utriainen, Mikko; Gao, Feng; Puurunen, Riikka L.

2018. Abstract from Workshop on Reference Nanomaterials, Berlin, Germany.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

TY - CONF

T1 - PillarHall LHAR structure for thin film conformality measurements

AU - Korpelainen, Virpi

AU - Ylivaara, Oili

AU - Ylilammi, Markku

AU - Utriainen, Mikko

AU - Gao, Feng

AU - Puurunen, Riikka L.

N1 - Poster presentation, abstract reviewed

PY - 2018/5/14

Y1 - 2018/5/14

M3 - Conference Abstract

ER -

Korpelainen V, Ylivaara O, Ylilammi M, Utriainen M, Gao F, Puurunen RL. PillarHall LHAR structure for thin film conformality measurements. 2018. Abstract from Workshop on Reference Nanomaterials, Berlin, Germany.