PillarHall LHAR structure for thin film conformality measurements

Virpi Korpelainen; Oili Ylivaara; Markku Ylilammi; Mikko Utriainen; Feng Gao; Riikka L. Puurunen

PillarHall LHAR structure for thin film conformality measurements

Virpi Korpelainen
, Oili Ylivaara
, Markku Ylilammi
, Mikko Utriainen
, Feng Gao
, Riikka L. Puurunen

VTT (former employee or external)
Aalto University

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 14 May 2018
MoE publication type	Not Eligible
Event	Workshop on Reference Nanomaterials: Current situation and needs: development, measurement, standardization - PTB, Berlin-Adlershof BESSY II, Berlin, Germany Duration: 14 May 2018 → 15 Jan 2019 https://www.ptb.de/cms/en/ptb/fachabteilungen/abt5/dates/nanoworkshop2018.html

Conference

Conference	Workshop on Reference Nanomaterials
Country/Territory	Germany
City	Berlin
Period	14/05/18 → 15/01/19
Internet address	https://www.ptb.de/cms/en/ptb/fachabteilungen/abt5/dates/nanoworkshop2018.html

Cite this

@conference{d205c18245794567bb3cefb1d12a774b,

title = "PillarHall LHAR structure for thin film conformality measurements",

author = "Virpi Korpelainen and Oili Ylivaara and Markku Ylilammi and Mikko Utriainen and Feng Gao and Puurunen, \{Riikka L.\}",

note = "Poster presentation, abstract reviewed; Workshop on Reference Nanomaterials : Current situation and needs: development, measurement, standardization ; Conference date: 14-05-2018 Through 15-01-2019",

year = "2018",

month = may,

day = "14",

language = "English",

url = "https://www.ptb.de/cms/en/ptb/fachabteilungen/abt5/dates/nanoworkshop2018.html",

}

TY - CONF

T1 - PillarHall LHAR structure for thin film conformality measurements

AU - Korpelainen, Virpi

AU - Ylivaara, Oili

AU - Ylilammi, Markku

AU - Utriainen, Mikko

AU - Gao, Feng

AU - Puurunen, Riikka L.

N1 - Poster presentation, abstract reviewed

PY - 2018/5/14

Y1 - 2018/5/14

M3 - Conference Abstract

T2 - Workshop on Reference Nanomaterials

Y2 - 14 May 2018 through 15 January 2019

ER -