Plasma etching microdevice fabrication: Thin film and process integration aspects: Dissertation

Sami Franssila

Research output: ThesisDissertation

Original languageEnglish
QualificationDoctor Degree
Awarding Institution
  • Helsinki University of Technology
Place of PublicationHelsinki
Print ISBNs951-666-450-4
Publication statusPublished - 1995
MoE publication typeG5 Doctoral dissertation (article)

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