Plasma etching microdevice fabrication: Thin film and process integration aspects: Dissertation

Sami Franssila

Research output: Thesis › Dissertation › Collection of Articles

Original language	English
Qualification	Doctor Degree
Awarding Institution	Helsinki University of Technology
Place of Publication	Helsinki
Print ISBNs	951-666-450-4
Publication status	Published - 1995
MoE publication type	G5 Doctoral dissertation (article)

Cite this

@phdthesis{ae15938136934e7ea7095dfa118f8dee,

title = "Plasma etching microdevice fabrication: Thin film and process integration aspects: Dissertation",

author = "Sami Franssila",

note = "ELE 41 p. + app. 38 p.",

year = "1995",

language = "English",

isbn = "951-666-450-4",

series = "Acta Polytechnica Scandinavica: EL Electrical Engineering Series",

publisher = "Finnish Academies of Technology",

school = "Helsinki University of Technology",

}