Plasma process optimization using orthogonal arrays

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the 15th Nordic Semiconductor Meeting
Editors	Sami Franssila, Riitta Paananen
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Pages	377-380
ISBN (Print)	951-47-6261-4
Publication status	Published - 1992
MoE publication type	A4 Article in a conference publication
Event	15th Nordic Semiconductor Meeting - Hämeenlinna, Finland Duration: 9 Jun 1992 → 11 Jun 1992 Conference number: 15

Conference	15th Nordic Semiconductor Meeting
Country/Territory	Finland
City	Hämeenlinna
Period	9/06/92 → 11/06/92

Proceedings of the 15th Nordic Semiconductor Meeting
Franssila, S. (Editor) & Paananen, R. (Editor), 1992, Espoo: VTT Technical Research Centre of Finland. 380 p.
Research output: Book/Report › Book (editor) › Scientific › peer-review

Cite this

@inproceedings{6f98528b5def4545a1be3898612ec23b,

title = "Plasma process optimization using orthogonal arrays",

author = "Sami Franssila and Markku Orpana and Jyrki Kiiham{\"a}ki",

note = "Project code: PUO1020; 15th Nordic Semiconductor Meeting ; Conference date: 09-06-1992 Through 11-06-1992",

year = "1992",

language = "English",

isbn = "951-47-6261-4",

pages = "377--380",

editor = "Sami Franssila and Riitta Paananen",

booktitle = "Proceedings of the 15th Nordic Semiconductor Meeting",

publisher = "VTT Technical Research Centre of Finland",

address = "Finland",

}

Plasma process optimization using orthogonal arrays. / Franssila, Sami; Orpana, Markku; Kiihamäki, Jyrki.
Proceedings of the 15th Nordic Semiconductor Meeting. ed. / Sami Franssila; Riitta Paananen. Espoo: VTT Technical Research Centre of Finland, 1992. p. 377-380.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Plasma process optimization using orthogonal arrays

AU - Franssila, Sami

AU - Orpana, Markku

AU - Kiihamäki, Jyrki

N1 - Conference code: 15

PY - 1992

Y1 - 1992

M3 - Conference article in proceedings

SN - 951-47-6261-4

SP - 377

EP - 380

BT - Proceedings of the 15th Nordic Semiconductor Meeting

A2 - Franssila, Sami

A2 - Paananen, Riitta

PB - VTT Technical Research Centre of Finland

CY - Espoo

T2 - 15th Nordic Semiconductor Meeting

Y2 - 9 June 1992 through 11 June 1992

ER -