"Plug-up" - A new concept for fabricating SOI MEMS devices

Jyrki Kiihamäki (Corresponding author), Panu Pekko, Hannu Kattelus, Teuvo Sillanpää, Tomi Mattila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)

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    Physics & Astronomy