"Plug-up": A new concept for fabricating SOI MEMS devices

Jyrki Kiihamäki (Corresponding Author), James Dekker, Panu Pekko, Hannu Kattelus, Teuvo Sillanpää, Tomi Mattila

    Research output: Contribution to journal › Article › Scientific › peer-review

    13 Citations (Scopus)

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    Engineering

    Material Science