"Plug-up": A new concept for fabricating SOI MEMS devices
- Jyrki Kiihamäki*
- , James Dekker
- , Panu Pekko
- , Hannu Kattelus
- , Teuvo Sillanpää
- , Tomi Mattila
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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