Abstract
A piezoelectric micromachined ultrasound transducer (PMUT) comprises a sacrificial layer (106) and at least one cavity (120') within a stack (104) of layers. Each of the at least one cavity (120') is laterally limited by a barrier structure (116). The barrier structure (116) extends through the thickness of the sacrificial layer (106) that is within the stack (104) of layers. The barrier structure (116) is resistive to an etching agent of the sacrificial layer (106). The PMUT comprises at least one hole (124) and/or an opening (300) each being associated and connected with each of the at least one cavity (120'). Each of the at least one hole (124) extends through a first layer arrangement (108') of the stack (104) and connects with a cavity of the at least one cavity (120'), and the opening (300) extends through a second layer arrangement (110') of the stack (104) and connects with a cavity of the at least one cavity (120'). The at least one hole (124) is smaller than the cavity area (120) which the at least one hole (124) is associated with. The opening (300) is equal to or smaller than the cavity area (120) which the opening (300) is associated with.
| Original language | English |
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| Patent number | WO2025242970A1 |
| IPC | B06B1/06,H10N30/082 |
| Priority date | 27/11/25 |
| Filing date | 22/05/25 |
| Publication status | Published - 27 Nov 2025 |
| MoE publication type | Not Eligible |