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Polishing of bulk micro-machined substrates by fixed abrasive pads for smoothing and planarization of MEMS structures
Martin Kulawski, Hannu Luoto, Kimmo Henttinen, Tommi Suni, Frauke Weimar, Jari Mäkinen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review