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Polishing of bulk micro-machined substrates by fixed abrasive pads for smoothing and planarization of MEMS structures
- Martin Kulawski
- , Hannu Luoto
- , Kimmo Henttinen
- , Tommi Suni
- , Frauke Weimar
- , Jari Mäkinen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review