Polymer and composite polymer slot waveguides

Marianne Hiltunen, W.S. Fegadolli, H.L.R. Lira, P. Vahimaa, Jussi Hiltunen, Sanna Aikio, V.R. Almeida, Pentti Karioja

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


A fully polymer slot Young interferometer operating at 633 nm wavelength was fabricated by using nanoimprint molding method. The phase response of the interference pattern was measured with several concentrations of glucose-water solutions, utilizing both TE and TM polarization states. The sensor was experimentally found to detect a bulk refractive index change of 6.4*10-6 RIU. Temperature dependency of silicon slot waveguide has been demonstrated to be reduced with composite slot waveguide structure. The slot filled with thermally stable polymer having negative thermo-optic coefficient showed nearly an athermal operation of silicon slot waveguide. Experimental results show that the slot waveguide geometry covered with Ormocomp has thermo-optical coefficient of 6 pm/K.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationVolume 9133, Silicon Photonics and Photonic Integrated Circuits IV; 91331G, 2014
PublisherInternational Society for Optics and Photonics SPIE
Number of pages8
ISBN (Print)978-1-6284-1081-5
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventSilicon Photonics and Photonic Integrated Circuits IV - Brussels, Belgium
Duration: 14 Apr 201417 Apr 2014

Publication series

SeriesProceedings of SPIE


ConferenceSilicon Photonics and Photonic Integrated Circuits IV


  • interferometers
  • polymers
  • ring-resonators
  • slot waveguides
  • thermo-optic coefficient

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