Porous silicon electrodes for high performance integrated supercapacitors

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)


    We demonstrate high performance porous Si based supercapacitor electrodes that can be utilized in integrated micro supercapacitors. The key enabler here is ultra-thin TiN coating of the porous Si matrix leading to high power and stability. The TiN layer is deposited by atomic layer deposition (ALD), which provides sufficient conformality to reach the bottom of the high aspect ratio pores. Our porous Si supercapacitor devices exhibit almost ideal double layer capacitor characteristic with electrode volumetric capacitance of 7.3 F/cm. Several orders of magnitude increase in power and energy density is obtained comparing to uncoated porous silicon electrodes. Good stability of devices is confirmed performing over 5 000 charge/discharge cycles.
    Original languageEnglish
    Title of host publicationProceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Number of pages3
    ISBN (Electronic)978-1-4799-4026-4
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    Event5th Electronics System-Integration Technology Conference, ESTC 2014 - Helsinki, Finland
    Duration: 16 Sept 201418 Sept 2014
    Conference number: 5th


    Conference5th Electronics System-Integration Technology Conference, ESTC 2014
    Abbreviated titleESTC 2014


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