Porous silicon electrodes for high performance integrated supercapacitors

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

We demonstrate high performance porous Si based supercapacitor electrodes that can be utilized in integrated micro supercapacitors. The key enabler here is ultra-thin TiN coating of the porous Si matrix leading to high power and stability. The TiN layer is deposited by atomic layer deposition (ALD), which provides sufficient conformality to reach the bottom of the high aspect ratio pores. Our porous Si supercapacitor devices exhibit almost ideal double layer capacitor characteristic with electrode volumetric capacitance of 7.3 F/cm. Several orders of magnitude increase in power and energy density is obtained comparing to uncoated porous silicon electrodes. Good stability of devices is confirmed performing over 5 000 charge/discharge cycles.
Original languageEnglish
Title of host publicationProceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014
PublisherInstitute of Electrical and Electronic Engineers IEEE
Number of pages3
ISBN (Electronic)978-1-4799-4026-4
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
Event5th Electronics System-Integration Technology Conference, ESTC 2014 - Helsinki, Finland
Duration: 16 Sep 201418 Sep 2014
Conference number: 5th

Conference

Conference5th Electronics System-Integration Technology Conference, ESTC 2014
Abbreviated titleESTC 2014
CountryFinland
CityHelsinki
Period16/09/1418/09/14

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electrochemical capacitors
porous silicon
electrodes
atomic layer epitaxy
high aspect ratio
radiant flux density
flux density
capacitance
porosity
coatings
cycles
matrices

Cite this

Grigoras, K., Keskinen, J., Ahopelto, J., & Prunnila, M. (2014). Porous silicon electrodes for high performance integrated supercapacitors. In Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014 Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ESTC.2014.6962717
Grigoras, Kestutis ; Keskinen, J. ; Ahopelto, Jouni ; Prunnila, Mika. / Porous silicon electrodes for high performance integrated supercapacitors. Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE, 2014.
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abstract = "We demonstrate high performance porous Si based supercapacitor electrodes that can be utilized in integrated micro supercapacitors. The key enabler here is ultra-thin TiN coating of the porous Si matrix leading to high power and stability. The TiN layer is deposited by atomic layer deposition (ALD), which provides sufficient conformality to reach the bottom of the high aspect ratio pores. Our porous Si supercapacitor devices exhibit almost ideal double layer capacitor characteristic with electrode volumetric capacitance of 7.3 F/cm. Several orders of magnitude increase in power and energy density is obtained comparing to uncoated porous silicon electrodes. Good stability of devices is confirmed performing over 5 000 charge/discharge cycles.",
author = "Kestutis Grigoras and J. Keskinen and Jouni Ahopelto and Mika Prunnila",
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Grigoras, K, Keskinen, J, Ahopelto, J & Prunnila, M 2014, Porous silicon electrodes for high performance integrated supercapacitors. in Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE, 5th Electronics System-Integration Technology Conference, ESTC 2014, Helsinki, Finland, 16/09/14. https://doi.org/10.1109/ESTC.2014.6962717

Porous silicon electrodes for high performance integrated supercapacitors. / Grigoras, Kestutis; Keskinen, J.; Ahopelto, Jouni; Prunnila, Mika.

Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE, 2014.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Ahopelto, Jouni

AU - Prunnila, Mika

N1 - Project code: 73742

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N2 - We demonstrate high performance porous Si based supercapacitor electrodes that can be utilized in integrated micro supercapacitors. The key enabler here is ultra-thin TiN coating of the porous Si matrix leading to high power and stability. The TiN layer is deposited by atomic layer deposition (ALD), which provides sufficient conformality to reach the bottom of the high aspect ratio pores. Our porous Si supercapacitor devices exhibit almost ideal double layer capacitor characteristic with electrode volumetric capacitance of 7.3 F/cm. Several orders of magnitude increase in power and energy density is obtained comparing to uncoated porous silicon electrodes. Good stability of devices is confirmed performing over 5 000 charge/discharge cycles.

AB - We demonstrate high performance porous Si based supercapacitor electrodes that can be utilized in integrated micro supercapacitors. The key enabler here is ultra-thin TiN coating of the porous Si matrix leading to high power and stability. The TiN layer is deposited by atomic layer deposition (ALD), which provides sufficient conformality to reach the bottom of the high aspect ratio pores. Our porous Si supercapacitor devices exhibit almost ideal double layer capacitor characteristic with electrode volumetric capacitance of 7.3 F/cm. Several orders of magnitude increase in power and energy density is obtained comparing to uncoated porous silicon electrodes. Good stability of devices is confirmed performing over 5 000 charge/discharge cycles.

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Grigoras K, Keskinen J, Ahopelto J, Prunnila M. Porous silicon electrodes for high performance integrated supercapacitors. In Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE. 2014 https://doi.org/10.1109/ESTC.2014.6962717