Abstract
Continuous miniaturization of electronic devices for
portable and wearable applications
requires miniaturized and integrated energy storage
solutions for which electrochemical double-layer
capacitors, the so-called supercapacitors, are among the
best candidates. In this chapter, a short description of
a supercapacitor structure, several advanced electrode
materials, and device characterization techniques are
presented. Development of porous silicon supercapacitors
is reviewed including the first publications and
discussion on the main advantages and problems related to
porous silicon electrodes. Various passivation techniques
of the surface, such as sputtering of metals, graphene
coating, and atomic layer
deposition, are described. In addition, potential on-chip
integration of porous silicon capacitors with high
capacitance and energy density is discussed.
| Original language | English |
|---|---|
| Title of host publication | Handbook of Porous Silicon |
| Place of Publication | Cham |
| Publisher | Springer |
| Pages | 1-11 |
| ISBN (Electronic) | 978-3-319-04508-5 |
| DOIs | |
| Publication status | Published - 2017 |
| MoE publication type | D2 Article in professional manuals or guides or professional information systems or text book material |
Keywords
- supercapacitor
- passivation
- graphene
- ALD
- TiN
- integration
- OtaNano