Porous silicon supercapacitors

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Abstract

Continuous miniaturization of electronic devices for portable and wearable applications requires miniaturized and integrated energy storage solutions for which electrochemical double-layer capacitors, the so-called supercapacitors, are among the best candidates. In this chapter, a short description of a supercapacitor structure, several advanced electrode materials, and device characterization techniques are presented. Development of porous silicon supercapacitors is reviewed including the first publications and discussion on the main advantages and problems related to porous silicon electrodes. Various passivation techniques of the surface, such as sputtering of metals, graphene coating, and atomic layer deposition, are described. In addition, potential on-chip integration of porous silicon capacitors with high capacitance and energy density is discussed.

Original languageEnglish
Title of host publicationHandbook of Porous Silicon
Subtitle of host publicationSecond Edition
EditorsLeigh Canham
PublisherSpringer
Pages1517-1529
Number of pages13
Edition2
ISBN (Electronic)978-3-319-71381-6, 978-3-319-71380-9
ISBN (Print)978-3-319-71379-3
DOIs
Publication statusPublished - 4 Jul 2018
MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

Fingerprint

Porous silicon
electrochemical capacitors
Silicon
porous silicon
Electrodes
Capacitors
Miniaturization
Equipment and Supplies
Graphite
Atomic layer deposition
Passivation
Energy storage
Graphene
Sputtering
Publications
Capacitance
Metals
miniaturization
Coatings
energy storage

Keywords

  • ALD
  • Graphene
  • Integration
  • Passivation
  • Supercapacitor
  • TiN

Cite this

Grigoras, K., Ahopelto, J., & Prunnila, M. (2018). Porous silicon supercapacitors. In L. Canham (Ed.), Handbook of Porous Silicon: Second Edition (2 ed., pp. 1517-1529). Springer. https://doi.org/10.1007/978-3-319-71381-6_116
Grigoras, Kestutis ; Ahopelto, Jouni ; Prunnila, Mika. / Porous silicon supercapacitors. Handbook of Porous Silicon: Second Edition. editor / Leigh Canham. 2. ed. Springer, 2018. pp. 1517-1529
@inbook{242d6c6ba54d4de693ba7459b122ef13,
title = "Porous silicon supercapacitors",
abstract = "Continuous miniaturization of electronic devices for portable and wearable applications requires miniaturized and integrated energy storage solutions for which electrochemical double-layer capacitors, the so-called supercapacitors, are among the best candidates. In this chapter, a short description of a supercapacitor structure, several advanced electrode materials, and device characterization techniques are presented. Development of porous silicon supercapacitors is reviewed including the first publications and discussion on the main advantages and problems related to porous silicon electrodes. Various passivation techniques of the surface, such as sputtering of metals, graphene coating, and atomic layer deposition, are described. In addition, potential on-chip integration of porous silicon capacitors with high capacitance and energy density is discussed.",
keywords = "ALD, Graphene, Integration, Passivation, Supercapacitor, TiN",
author = "Kestutis Grigoras and Jouni Ahopelto and Mika Prunnila",
year = "2018",
month = "7",
day = "4",
doi = "10.1007/978-3-319-71381-6_116",
language = "English",
isbn = "978-3-319-71379-3",
pages = "1517--1529",
editor = "Leigh Canham",
booktitle = "Handbook of Porous Silicon",
publisher = "Springer",
address = "Germany",
edition = "2",

}

Grigoras, K, Ahopelto, J & Prunnila, M 2018, Porous silicon supercapacitors. in L Canham (ed.), Handbook of Porous Silicon: Second Edition. 2 edn, Springer, pp. 1517-1529. https://doi.org/10.1007/978-3-319-71381-6_116

Porous silicon supercapacitors. / Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika.

Handbook of Porous Silicon: Second Edition. ed. / Leigh Canham. 2. ed. Springer, 2018. p. 1517-1529.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

TY - CHAP

T1 - Porous silicon supercapacitors

AU - Grigoras, Kestutis

AU - Ahopelto, Jouni

AU - Prunnila, Mika

PY - 2018/7/4

Y1 - 2018/7/4

N2 - Continuous miniaturization of electronic devices for portable and wearable applications requires miniaturized and integrated energy storage solutions for which electrochemical double-layer capacitors, the so-called supercapacitors, are among the best candidates. In this chapter, a short description of a supercapacitor structure, several advanced electrode materials, and device characterization techniques are presented. Development of porous silicon supercapacitors is reviewed including the first publications and discussion on the main advantages and problems related to porous silicon electrodes. Various passivation techniques of the surface, such as sputtering of metals, graphene coating, and atomic layer deposition, are described. In addition, potential on-chip integration of porous silicon capacitors with high capacitance and energy density is discussed.

AB - Continuous miniaturization of electronic devices for portable and wearable applications requires miniaturized and integrated energy storage solutions for which electrochemical double-layer capacitors, the so-called supercapacitors, are among the best candidates. In this chapter, a short description of a supercapacitor structure, several advanced electrode materials, and device characterization techniques are presented. Development of porous silicon supercapacitors is reviewed including the first publications and discussion on the main advantages and problems related to porous silicon electrodes. Various passivation techniques of the surface, such as sputtering of metals, graphene coating, and atomic layer deposition, are described. In addition, potential on-chip integration of porous silicon capacitors with high capacitance and energy density is discussed.

KW - ALD

KW - Graphene

KW - Integration

KW - Passivation

KW - Supercapacitor

KW - TiN

UR - http://www.scopus.com/inward/record.url?scp=85053991220&partnerID=8YFLogxK

U2 - 10.1007/978-3-319-71381-6_116

DO - 10.1007/978-3-319-71381-6_116

M3 - Chapter or book article

AN - SCOPUS:85053991220

SN - 978-3-319-71379-3

SP - 1517

EP - 1529

BT - Handbook of Porous Silicon

A2 - Canham, Leigh

PB - Springer

ER -

Grigoras K, Ahopelto J, Prunnila M. Porous silicon supercapacitors. In Canham L, editor, Handbook of Porous Silicon: Second Edition. 2 ed. Springer. 2018. p. 1517-1529 https://doi.org/10.1007/978-3-319-71381-6_116