Portable methane sensor Demonstrator based on LTCC differential photo acoustic cell and silicon cantilever

Kimmo Keränen (Corresponding Author), J. Ollila, H. Saloniemi, B. Matveev, J. Raittila, A. Helle, I. Kauppinen, T. Kuusela, L. Pierno, P. Karioja, M. Karppinen

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

4 Citations (Scopus)

Abstract

A novel portable methane sensor demonstrator based on Low Temperature Co-fired Ceramic (LTCC) differential Photo Acoustic (PA) cell, silicon cantilever and spatial interferometer was demonstrated. Silicon Micro-Electro-Mechanical-System (MEMS) cantilever-based PA technology allows sensing of extremely low gas concentrations with wide dynamic measuring range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement was probed with an optical interferometer providing a pico-meter resolution. In the demonstrated gas sensor structure, the silicon cantilever microphone was placed in a two-chamber differential gas cell so that the achieved differential pressure signal was proportional to gas concentration in the open measurement path for gas flow. The pulsed optical power was produced by two Mid Infra-Red (MIR) Light Emitting Diodes (LEDs). The differential PA gas cell structure included two 8 mm cylindrical cells, diameter 2.4 mm, for reference and measurement detection portions coated with a silver paste. A transparent sapphire window was hermetically sealed on top of the differential gas cell structure in order to probe the displacement of the silicon cantilever inside the sealed differential cell. The sealed methane gas produced selectivity against other possible gases in the measurement path. The first sensor prototype sensitivity was 300 ppm with 1 s response time for the methane gas. Sensitivity is increased to be 30 ppm, when response time of 100 s is used. The selectivity in the demonstrated sensor is possible to tune simply by filling the differential cell with specific gas in focus and selecting corresponding LED with proper emission spectrum. Sensor concept provides possibility to measure extremely low gas concentrations of a wide range of gases having fundamental absorption bands at 3 - 7 μm wavelength range including CO, CO2 and CH4.
Original languageEnglish
Pages (from-to)1438-1441
JournalProcedia Engineering
Volume47
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication
Event26th European Conference on Solid-State Transducers, EUROSENSOR 2012 - Krakow, Poland
Duration: 9 Sep 201212 Sep 2012

Fingerprint

Methane
Acoustics
Silicon
Sensors
Gases
Temperature
Microphones
Interferometers
Light emitting diodes
Chemical sensors
Sapphire
Flow of gases
Absorption spectra
Silver
Infrared radiation
Wavelength

Keywords

  • differential LTCC gas cell
  • LTCC
  • silicon cantilever
  • photo acoustic gas sensing
  • hermetic sealing
  • micro immersion lens
  • MIR LEDs
  • differential infra-red detector
  • interferometric probing

Cite this

Keränen, K., Ollila, J., Saloniemi, H., Matveev, B., Raittila, J., Helle, A., ... Karppinen, M. (2012). Portable methane sensor Demonstrator based on LTCC differential photo acoustic cell and silicon cantilever. Procedia Engineering, 47, 1438-1441. https://doi.org/10.1016/j.proeng.2012.09.428
Keränen, Kimmo ; Ollila, J. ; Saloniemi, H. ; Matveev, B. ; Raittila, J. ; Helle, A. ; Kauppinen, I. ; Kuusela, T. ; Pierno, L. ; Karioja, P. ; Karppinen, M. . / Portable methane sensor Demonstrator based on LTCC differential photo acoustic cell and silicon cantilever. In: Procedia Engineering. 2012 ; Vol. 47. pp. 1438-1441.
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abstract = "A novel portable methane sensor demonstrator based on Low Temperature Co-fired Ceramic (LTCC) differential Photo Acoustic (PA) cell, silicon cantilever and spatial interferometer was demonstrated. Silicon Micro-Electro-Mechanical-System (MEMS) cantilever-based PA technology allows sensing of extremely low gas concentrations with wide dynamic measuring range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement was probed with an optical interferometer providing a pico-meter resolution. In the demonstrated gas sensor structure, the silicon cantilever microphone was placed in a two-chamber differential gas cell so that the achieved differential pressure signal was proportional to gas concentration in the open measurement path for gas flow. The pulsed optical power was produced by two Mid Infra-Red (MIR) Light Emitting Diodes (LEDs). The differential PA gas cell structure included two 8 mm cylindrical cells, diameter 2.4 mm, for reference and measurement detection portions coated with a silver paste. A transparent sapphire window was hermetically sealed on top of the differential gas cell structure in order to probe the displacement of the silicon cantilever inside the sealed differential cell. The sealed methane gas produced selectivity against other possible gases in the measurement path. The first sensor prototype sensitivity was 300 ppm with 1 s response time for the methane gas. Sensitivity is increased to be 30 ppm, when response time of 100 s is used. The selectivity in the demonstrated sensor is possible to tune simply by filling the differential cell with specific gas in focus and selecting corresponding LED with proper emission spectrum. Sensor concept provides possibility to measure extremely low gas concentrations of a wide range of gases having fundamental absorption bands at 3 - 7 μm wavelength range including CO, CO2 and CH4.",
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Keränen, K, Ollila, J, Saloniemi, H, Matveev, B, Raittila, J, Helle, A, Kauppinen, I, Kuusela, T, Pierno, L, Karioja, P & Karppinen, M 2012, 'Portable methane sensor Demonstrator based on LTCC differential photo acoustic cell and silicon cantilever', Procedia Engineering, vol. 47, pp. 1438-1441. https://doi.org/10.1016/j.proeng.2012.09.428

Portable methane sensor Demonstrator based on LTCC differential photo acoustic cell and silicon cantilever. / Keränen, Kimmo (Corresponding Author); Ollila, J.; Saloniemi, H.; Matveev, B.; Raittila, J. ; Helle, A.; Kauppinen, I.; Kuusela, T.; Pierno, L.; Karioja, P. ; Karppinen, M. .

In: Procedia Engineering, Vol. 47, 2012, p. 1438-1441.

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

TY - JOUR

T1 - Portable methane sensor Demonstrator based on LTCC differential photo acoustic cell and silicon cantilever

AU - Keränen, Kimmo

AU - Ollila, J.

AU - Saloniemi, H.

AU - Matveev, B.

AU - Raittila, J.

AU - Helle, A.

AU - Kauppinen, I.

AU - Kuusela, T.

AU - Pierno, L.

AU - Karioja, P.

AU - Karppinen, M.

PY - 2012

Y1 - 2012

N2 - A novel portable methane sensor demonstrator based on Low Temperature Co-fired Ceramic (LTCC) differential Photo Acoustic (PA) cell, silicon cantilever and spatial interferometer was demonstrated. Silicon Micro-Electro-Mechanical-System (MEMS) cantilever-based PA technology allows sensing of extremely low gas concentrations with wide dynamic measuring range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement was probed with an optical interferometer providing a pico-meter resolution. In the demonstrated gas sensor structure, the silicon cantilever microphone was placed in a two-chamber differential gas cell so that the achieved differential pressure signal was proportional to gas concentration in the open measurement path for gas flow. The pulsed optical power was produced by two Mid Infra-Red (MIR) Light Emitting Diodes (LEDs). The differential PA gas cell structure included two 8 mm cylindrical cells, diameter 2.4 mm, for reference and measurement detection portions coated with a silver paste. A transparent sapphire window was hermetically sealed on top of the differential gas cell structure in order to probe the displacement of the silicon cantilever inside the sealed differential cell. The sealed methane gas produced selectivity against other possible gases in the measurement path. The first sensor prototype sensitivity was 300 ppm with 1 s response time for the methane gas. Sensitivity is increased to be 30 ppm, when response time of 100 s is used. The selectivity in the demonstrated sensor is possible to tune simply by filling the differential cell with specific gas in focus and selecting corresponding LED with proper emission spectrum. Sensor concept provides possibility to measure extremely low gas concentrations of a wide range of gases having fundamental absorption bands at 3 - 7 μm wavelength range including CO, CO2 and CH4.

AB - A novel portable methane sensor demonstrator based on Low Temperature Co-fired Ceramic (LTCC) differential Photo Acoustic (PA) cell, silicon cantilever and spatial interferometer was demonstrated. Silicon Micro-Electro-Mechanical-System (MEMS) cantilever-based PA technology allows sensing of extremely low gas concentrations with wide dynamic measuring range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement was probed with an optical interferometer providing a pico-meter resolution. In the demonstrated gas sensor structure, the silicon cantilever microphone was placed in a two-chamber differential gas cell so that the achieved differential pressure signal was proportional to gas concentration in the open measurement path for gas flow. The pulsed optical power was produced by two Mid Infra-Red (MIR) Light Emitting Diodes (LEDs). The differential PA gas cell structure included two 8 mm cylindrical cells, diameter 2.4 mm, for reference and measurement detection portions coated with a silver paste. A transparent sapphire window was hermetically sealed on top of the differential gas cell structure in order to probe the displacement of the silicon cantilever inside the sealed differential cell. The sealed methane gas produced selectivity against other possible gases in the measurement path. The first sensor prototype sensitivity was 300 ppm with 1 s response time for the methane gas. Sensitivity is increased to be 30 ppm, when response time of 100 s is used. The selectivity in the demonstrated sensor is possible to tune simply by filling the differential cell with specific gas in focus and selecting corresponding LED with proper emission spectrum. Sensor concept provides possibility to measure extremely low gas concentrations of a wide range of gases having fundamental absorption bands at 3 - 7 μm wavelength range including CO, CO2 and CH4.

KW - differential LTCC gas cell

KW - LTCC

KW - silicon cantilever

KW - photo acoustic gas sensing

KW - hermetic sealing

KW - micro immersion lens

KW - MIR LEDs

KW - differential infra-red detector

KW - interferometric probing

U2 - 10.1016/j.proeng.2012.09.428

DO - 10.1016/j.proeng.2012.09.428

M3 - Article in a proceedings journal

VL - 47

SP - 1438

EP - 1441

JO - Procedia Engineering

JF - Procedia Engineering

SN - 1877-7058

ER -