Post deposition excimer laser processing of MoSx thin films

Tom Jervis, Juha-Pekka Hirvonen, Michael Nastasi

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Abstract

We have examined the effect of excimer laser surface processing and doping with Au on the mechanical, tribological, and bonding properties of MoSx thin films. We find that the effects of processing are manifested primarily in the surface of the films, but that there is also some film-substrate interaction during high fluence processing. The changes are sufficient to dramatically alter the wear life of the films. At low loads, laser processing alone reduces the run-in period and increases wear life. At higher loads, processing reduces wear life, although the run-in period is still short. These results are understood in terms of changes in the hardness of the surface of the films. Laser processing renders deposited films insensitive to high humidity storage. After laser processing, Raman spectroscopy shows changes in bonding to that characteristic of single crystal MoS2. Laser doping with Au results in wear life comparable to or greater than that of unprocessed films even at the highest loads used. Thus, laser doped MoSx films show lower initial friction, comparable wear life, and may exhibit greater environmental stability than as-deposited films.

Original languageEnglish
Pages (from-to)1350 - 1357
Number of pages8
JournalJournal of Materials Research
Volume6
Issue number6
DOIs
Publication statusPublished - 1991
MoE publication typeNot Eligible

Fingerprint

Excimer lasers
excimer lasers
Thin films
thin films
Processing
Wear of materials
Lasers
lasers
Doping (additives)
Raman spectroscopy
humidity
Atmospheric humidity
fluence
friction
hardness
Hardness
Single crystals
mechanical properties
Friction
single crystals

Cite this

Jervis, Tom ; Hirvonen, Juha-Pekka ; Nastasi, Michael. / Post deposition excimer laser processing of MoSx thin films. In: Journal of Materials Research. 1991 ; Vol. 6, No. 6. pp. 1350 - 1357.
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Post deposition excimer laser processing of MoSx thin films. / Jervis, Tom; Hirvonen, Juha-Pekka; Nastasi, Michael.

In: Journal of Materials Research, Vol. 6, No. 6, 1991, p. 1350 - 1357.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Post deposition excimer laser processing of MoSx thin films

AU - Jervis, Tom

AU - Hirvonen, Juha-Pekka

AU - Nastasi, Michael

N1 - Project code: MRG11752

PY - 1991

Y1 - 1991

N2 - We have examined the effect of excimer laser surface processing and doping with Au on the mechanical, tribological, and bonding properties of MoSx thin films. We find that the effects of processing are manifested primarily in the surface of the films, but that there is also some film-substrate interaction during high fluence processing. The changes are sufficient to dramatically alter the wear life of the films. At low loads, laser processing alone reduces the run-in period and increases wear life. At higher loads, processing reduces wear life, although the run-in period is still short. These results are understood in terms of changes in the hardness of the surface of the films. Laser processing renders deposited films insensitive to high humidity storage. After laser processing, Raman spectroscopy shows changes in bonding to that characteristic of single crystal MoS2. Laser doping with Au results in wear life comparable to or greater than that of unprocessed films even at the highest loads used. Thus, laser doped MoSx films show lower initial friction, comparable wear life, and may exhibit greater environmental stability than as-deposited films.

AB - We have examined the effect of excimer laser surface processing and doping with Au on the mechanical, tribological, and bonding properties of MoSx thin films. We find that the effects of processing are manifested primarily in the surface of the films, but that there is also some film-substrate interaction during high fluence processing. The changes are sufficient to dramatically alter the wear life of the films. At low loads, laser processing alone reduces the run-in period and increases wear life. At higher loads, processing reduces wear life, although the run-in period is still short. These results are understood in terms of changes in the hardness of the surface of the films. Laser processing renders deposited films insensitive to high humidity storage. After laser processing, Raman spectroscopy shows changes in bonding to that characteristic of single crystal MoS2. Laser doping with Au results in wear life comparable to or greater than that of unprocessed films even at the highest loads used. Thus, laser doped MoSx films show lower initial friction, comparable wear life, and may exhibit greater environmental stability than as-deposited films.

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DO - 10.1557/JMR.1991.1350

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