Power-efficient thermo-optic phase shifters with cavity-SOI

Päivi Heimala; Mikko Harjanne; Somnath Paul; Markku Kapulainen; Fei Sun; Juha Larismaa; Timo Aalto

doi:10.1117/12.3002326

Power-efficient thermo-optic phase shifters with cavity-SOI

Päivi Heimala^*, Mikko Harjanne, Somnath Paul, Markku Kapulainen, Fei Sun, Juha Larismaa, Timo Aalto

^*Corresponding author for this work

BA6203 Silicon photonics

Okmetic Oyj

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

Power-efficient thermo-optic phase shifters have been demonstrated using 3 µm thick silicon on insulator (SOI) waveguides fabricated on cavity-SOI wafers. In cavity-SOI the cavities are premade in the SOI wafer which simplifies the processing of the waveguides with thermally insulated heater structures. Measurement results of asymmetric Mach-Zehnder interferometric TO switches show a 10-fold decrease in required power for a π phase shift in devices fabricated on cavity-SOI when compared to devices fabricated on plain SOI. With the cavities the required heating power for the π phase shift is only 2.1 mW. Numerical simulations support the experimental results.

Original language	English
Title of host publication	Silicon Photonics XIX
Editors	Graham T. Reed, Andrew P. Knights
Publisher	International Society for Optics and Photonics SPIE
Number of pages	8
ISBN (Electronic)	978-1-5106-7042-6
DOIs	https://doi.org/10.1117/12.3002326
Publication status	Published - 2024
MoE publication type	A4 Article in a conference publication
Event	Silicon Photonics XIX 2024 - San Francisco, United States Duration: 29 Jan 2024 → 31 Jan 2024

Publication series

Series	Proceedings of SPIE
Volume	12891
ISSN	0277-786X

Conference

Conference	Silicon Photonics XIX 2024
Country/Territory	United States
City	San Francisco
Period	29/01/24 → 31/01/24

Funding

This work has received funding from Business Finland funded projects RAPSI and PICAP. The work is also part of the Academy of Finland Flagship Programme, Photonics Research and Innovation (PREIN).

Keywords

cavity-SOI
silicon photonics
thermo-optic phase shifter

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10.1117/12.3002326

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title = "Power-efficient thermo-optic phase shifters with cavity-SOI",

abstract = "Power-efficient thermo-optic phase shifters have been demonstrated using 3 µm thick silicon on insulator (SOI) waveguides fabricated on cavity-SOI wafers. In cavity-SOI the cavities are premade in the SOI wafer which simplifies the processing of the waveguides with thermally insulated heater structures. Measurement results of asymmetric Mach-Zehnder interferometric TO switches show a 10-fold decrease in required power for a π phase shift in devices fabricated on cavity-SOI when compared to devices fabricated on plain SOI. With the cavities the required heating power for the π phase shift is only 2.1 mW. Numerical simulations support the experimental results.",

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author = "P{\"a}ivi Heimala and Mikko Harjanne and Somnath Paul and Markku Kapulainen and Fei Sun and Juha Larismaa and Timo Aalto",

note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; Silicon Photonics XIX 2024 ; Conference date: 29-01-2024 Through 31-01-2024",

year = "2024",

doi = "10.1117/12.3002326",

language = "English",

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}

Heimala, P , Harjanne, M , Paul, S , Kapulainen, M , Sun, F, Larismaa, J & Aalto, T 2024, Power-efficient thermo-optic phase shifters with cavity-SOI. in GT Reed & AP Knights (eds), Silicon Photonics XIX., 128910G, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 12891, Silicon Photonics XIX 2024, San Francisco, United States, 29/01/24. https://doi.org/10.1117/12.3002326

Power-efficient thermo-optic phase shifters with cavity-SOI. / Heimala, Päivi ; Harjanne, Mikko ; Paul, Somnath et al.
Silicon Photonics XIX. ed. / Graham T. Reed; Andrew P. Knights. International Society for Optics and Photonics SPIE, 2024. 128910G (Proceedings of SPIE, Vol. 12891).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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T1 - Power-efficient thermo-optic phase shifters with cavity-SOI

AU - Heimala, Päivi

AU - Harjanne, Mikko

AU - Paul, Somnath

AU - Kapulainen, Markku

AU - Sun, Fei

AU - Larismaa, Juha

AU - Aalto, Timo

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N2 - Power-efficient thermo-optic phase shifters have been demonstrated using 3 µm thick silicon on insulator (SOI) waveguides fabricated on cavity-SOI wafers. In cavity-SOI the cavities are premade in the SOI wafer which simplifies the processing of the waveguides with thermally insulated heater structures. Measurement results of asymmetric Mach-Zehnder interferometric TO switches show a 10-fold decrease in required power for a π phase shift in devices fabricated on cavity-SOI when compared to devices fabricated on plain SOI. With the cavities the required heating power for the π phase shift is only 2.1 mW. Numerical simulations support the experimental results.

AB - Power-efficient thermo-optic phase shifters have been demonstrated using 3 µm thick silicon on insulator (SOI) waveguides fabricated on cavity-SOI wafers. In cavity-SOI the cavities are premade in the SOI wafer which simplifies the processing of the waveguides with thermally insulated heater structures. Measurement results of asymmetric Mach-Zehnder interferometric TO switches show a 10-fold decrease in required power for a π phase shift in devices fabricated on cavity-SOI when compared to devices fabricated on plain SOI. With the cavities the required heating power for the π phase shift is only 2.1 mW. Numerical simulations support the experimental results.

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Power-efficient thermo-optic phase shifters with cavity-SOI

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