Precision prism coupling setup applied to measure planar silica films on silicon

Päivi Heimala, Jaakko Aarnio, Simo Tammela

    Research output: Book/ReportReport

    Original languageEnglish
    Place of PublicationHelsinki
    PublisherUniversity of Helsinki
    Number of pages28
    ISBN (Print)978-951-45-6143-6
    Publication statusPublished - 1992
    MoE publication typeD4 Published development or research report or study

    Publication series

    SeriesUniversity of Helsinki: Department of Physics. Report Series in Physics
    NumberHU-P-258
    ISSN0355-5801

    Cite this

    Heimala, P., Aarnio, J., & Tammela, S. (1992). Precision prism coupling setup applied to measure planar silica films on silicon. University of Helsinki. University of Helsinki: Department of Physics. Report Series in Physics, No. HU-P-258