Precision prism coupling setup applied to measure planar silica films on silicon

Päivi Heimala, Jaakko Aarnio, Simo Tammela

Research output: Book/Report › Report

Original language	English
Place of Publication	Helsinki
Publisher	University of Helsinki
Number of pages	28
ISBN (Print)	978-951-45-6143-6
Publication status	Published - 1992
MoE publication type	D4 Published development or research report or study

Series	University of Helsinki: Department of Physics. Report Series in Physics
Number	HU-P-258
ISSN	0355-5801

Cite this

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title = "Precision prism coupling setup applied to measure planar silica films on silicon",

author = "P{\"a}ivi Heimala and Jaakko Aarnio and Simo Tammela",

note = "Project code: PUO8004",

year = "1992",

language = "English",

isbn = "978-951-45-6143-6",

series = "University of Helsinki: Department of Physics. Report Series in Physics",

publisher = "University of Helsinki",

number = "HU-P-258",

address = "Finland",

}

TY - BOOK

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AU - Heimala, Päivi

AU - Aarnio, Jaakko

AU - Tammela, Simo

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PY - 1992

Y1 - 1992

M3 - Report

SN - 978-951-45-6143-6

T3 - University of Helsinki: Department of Physics. Report Series in Physics

BT - Precision prism coupling setup applied to measure planar silica films on silicon

PB - University of Helsinki

CY - Helsinki

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