Pressure sensor

Tapio Pernu; Jukka Kyynäräinen; Jaakko Saarilahti

Pressure sensor

Tapio Pernu (Inventor)
, Jukka Kyynäräinen (Inventor)
, Jaakko Saarilahti (Inventor)

VTT Technical Research Centre of Finland

Research output: Patent › Patent

Abstract

According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement.

Patent family as of 21.7.2026
CN112673243 A, DE602019041544 D1, EP3850325 A1, EP3850325 B1, US11767218 BB, US2022048761 AA, WO20053485 A1

Original language	English
Patent number	EP3850325 B1
IPC	G01L19/00
Priority date	14/09/18
Filing date	12/09/19
Publication status	Published - 15 Nov 2023
MoE publication type	H1 Granted patent

Cite this

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title = "Pressure sensor",

abstract = "According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement. Patent family as of 21.7.2026 CN112673243 A, DE602019041544 D1, EP3850325 A1, EP3850325 B1, US11767218 BB, US2022048761 AA, WO20053485 A1",

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TY - PAT

T1 - Pressure sensor

AU - Pernu, Tapio

AU - Kyynäräinen, Jukka

AU - Saarilahti, Jaakko

PY - 2023/11/15

Y1 - 2023/11/15

N2 - According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement. Patent family as of 21.7.2026 CN112673243 A, DE602019041544 D1, EP3850325 A1, EP3850325 B1, US11767218 BB, US2022048761 AA, WO20053485 A1

AB - According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement. Patent family as of 21.7.2026 CN112673243 A, DE602019041544 D1, EP3850325 A1, EP3850325 B1, US11767218 BB, US2022048761 AA, WO20053485 A1

UR - https://fi.espacenet.com/publicationDetails/biblio?II=0&ND=3&adjacent=true&locale=fi_FI&FT=D&date=20210721&CC=EP&NR=3850325A1&KC=A1

M3 - Patent

M1 - EP3850325 B1

Y2 - 2019/09/12

ER -

Pressure sensor

Abstract

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