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Pressure sensor
Tapio Pernu (Inventor)
, Jukka Kyynäräinen (Inventor)
, Jaakko Saarilahti (Inventor)
VTT Technical Research Centre of Finland
Research output
:
Patent
›
Patent
Overview
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INIS
sensors
100%
output
75%
volume
37%
valves
25%
patents
12%
membranes
12%
inventions
12%
pressure measurement
12%
Keyphrases
Pressure Sensor
100%
MEMS Pressure Sensor
20%
Patent Family
20%
Pressure Measurement
20%
Deformable Membrane
20%
Engineering
Pressure Sensor
100%
Patent Family
16%
Microelectromechanical System
16%