Pressure sensor elements integrated with CMOS

Jyrki Kiihamäki, Tapani Vehmas, Tommi Suni, Ari Häärä, Miikka Ylimaula, Jaakko Rouhio

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationNSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2005
Subtitle of host publicationAnaheim, CA, USA, 8-12 May 2005
Pages475-478
Volume2
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication

Keywords

  • MEMS
  • SOI
  • monolithical integration

Cite this

Kiihamäki, J., Vehmas, T., Suni, T., Häärä, A., Ylimaula, M., & Rouhio, J. (2005). Pressure sensor elements integrated with CMOS. In NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2005: Anaheim, CA, USA, 8-12 May 2005 (Vol. 2, pp. 475-478)