Pressure sensor elements integrated with CMOS

Jyrki Kiihamäki, Tapani Vehmas, Tommi Suni, Ari Häärä, Miikka Ylimaula, Jaakko Rouhio

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2005
Subtitle of host publication	Anaheim, CA, USA, 8-12 May 2005
Pages	475-478
Volume	2
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{57e9f18924ed4d8c8656fd9c87bca3e2,

title = "Pressure sensor elements integrated with CMOS",

keywords = "MEMS, SOI, monolithical integration",

author = "Jyrki Kiiham{\"a}ki and Tapani Vehmas and Tommi Suni and Ari H{\"a}{\"a}r{\"a} and Miikka Ylimaula and Jaakko Rouhio",

year = "2005",

language = "English",

isbn = "0-9767985-1-4",

volume = "2",

pages = "475--478",

booktitle = "NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2005",

}

TY - GEN

T1 - Pressure sensor elements integrated with CMOS

AU - Kiihamäki, Jyrki

AU - Vehmas, Tapani

AU - Suni, Tommi

AU - Häärä, Ari

AU - Ylimaula, Miikka

AU - Rouhio, Jaakko

PY - 2005

Y1 - 2005

KW - MEMS

KW - SOI

KW - monolithical integration

M3 - Conference article in proceedings

SN - 0-9767985-1-4

SN - 978-0-9767985-1-4

VL - 2

SP - 475

EP - 478

BT - NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2005

ER -