Pressure sensor elements integrated with CMOS

Jyrki Kiihamäki, Tapani Vehmas, Tommi Suni, Ari Häärä, Miikka Ylimaula, Jaakko Rouhio

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationNSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2005
Subtitle of host publicationAnaheim, CA, USA, 8-12 May 2005
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication


  • MEMS
  • SOI
  • monolithical integration

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