Primary Humidity Standards for Trace Water Measurements in Ultra-High-Purity Process Gases

Trace water is one of the most critical matrix contaminants in ultra-high-purity (UHP) process gases, like argon (Ar), nitrogen (N2), and many others. Even trace amounts can severely degrade the quality of many products that are reliant on these gases. Despite its importance to advanced technology sectors, notably semiconductor manufacturing, it has proven quite difficult to realize preparative or analytical trace water metrology over the full amount fraction range needed or in the broad spectrum of industrially relevant matrix gases. Within the EU-funded PROMETH2O project consortium, this challenge has been addressed through the development or significant improvement of traceable measurement methods and standards spanning 5 nmol⋅mol−1 to 5 µmol⋅mol−1, tailored for use in UHP process gas production, such as Ar, N2 and clean dry air (CDA). The measurement ranges were extended and the uncertainties were improved while being consistent with the current best practice at primary humidity standard laboratories. The developed standards provide combined standard uncertainties ranging from approximately 0.4 % to 1.5 % in water vapor amount fraction and from 0.03 °C to 0.07 °C in frost-point temperature, while the comb-assisted CRDS system achieves detection limits in the sub-ppb to ppt range. These capabilities were validated in applications that are relevant to process instrumentation and the gas industry. A distributed metrological infrastructure at various European national metrology institutes and partner sites now provides SI-traceable trace water measurements in UHP gases, strongly supporting and extending the calibration capabilities for the gas and semiconductor industries and the associated stakeholders.