Proceedings of the Advanced Summer School on Microelectronic Physics and Technology for VLSI

Research output: Book/Report › Book (editor) › Scientific › peer-review

Original language	English
Place of Publication	Espoo
Number of pages	221
Publication status	Published - 1987
MoE publication type	C2 Edited books
Event	Advanced Summer School on Microelectronics: Physics and Technology for ULSI - Espoo, Finland Duration: 8 Jun 1987 → 12 Jun 1987

Series	Acta Polytechnica Scandinavica: EL Electrical Engineering Series
Volume	58
ISSN	0001-6845

Cite this

@book{69f4c5d533894862990574008b02a5a3,

title = "Proceedings of the Advanced Summer School on Microelectronic Physics and Technology for VLSI",

editor = "Tor Stubb and Riitta Paananen",

year = "1987",

language = "English",

isbn = "951-666-248-X",

series = "Acta Polytechnica Scandinavica: EL Electrical Engineering Series",

publisher = "Finnish Academies of Technology",

note = "Advanced Summer School on Microelectronics : Physics and Technology for ULSI ; Conference date: 08-06-1987 Through 12-06-1987",

}

TY - BOOK

T1 - Proceedings of the Advanced Summer School on Microelectronic Physics and Technology for VLSI

A2 - Stubb, Tor

A2 - Paananen, Riitta

PY - 1987

Y1 - 1987

M3 - Book (editor)

SN - 951-666-248-X

T3 - Acta Polytechnica Scandinavica: EL Electrical Engineering Series

BT - Proceedings of the Advanced Summer School on Microelectronic Physics and Technology for VLSI

CY - Espoo

T2 - Advanced Summer School on Microelectronics

Y2 - 8 June 1987 through 12 June 1987

ER -