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Process alternatives for manufacturing integrated inductors
Tarja Riihisaari
, Hannu Kattelus
, Esa Tarvainen
VTT Technical Research Centre of Finland
Research output
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Contribution to journal
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Article
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Scientific
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peer-review
Overview
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Engineering
Metallizations
100%
Parasitic Capacitance
100%
Silicon Substrate
50%
Manufacturability
50%
Frequency Operation
50%
Series Resistance
50%
Oxide Thickness
50%
Passive Element
50%
Q Factor
50%
Integrated Circuit
50%
Aluminum
50%
INIS
manufacturing
100%
inductors
100%
capacitance
28%
devices
28%
silicon
28%
demand
28%
comparative evaluations
14%
levels
14%
thickness
14%
aluminium
14%
substrates
14%
oxides
14%
operation
14%
gold
14%
sputtering
14%
fabrication
14%
integrated circuits
14%
quality factor
14%
Material Science
Capacitance
100%
Electronic Circuit
50%
Silicon
50%
Aluminum
50%
Silicon Substrate
50%
Oxide Thickness
50%
Keyphrases
Alternative Metallization
40%
Integrated Circuit Manufacturing
20%