Processing of microstrip detectors on Czochralski grown high resistivity silicon substrates

J. Härkönen; Eija Tuominen; E. Tuovinen; P. Mehtälä; K. Lassila-Perini; V. Ovchinnikov; M. Yli-Koski; L. Palmu; S. Kallijärvi; H. Nikkilä; Olli Anttila; T. Niinikoski; V. Eremin; A. Ivanov; E. Verbitskaya

doi:10.1016/j.nima.2003.08.102

Processing of microstrip detectors on Czochralski grown high resistivity silicon substrates

J. Härkönen
, Eija Tuominen
, E. Tuovinen
, P. Mehtälä
, K. Lassila-Perini
, V. Ovchinnikov
, M. Yli-Koski
, L. Palmu
, S. Kallijärvi
, H. Nikkilä
, Olli Anttila
, T. Niinikoski
, V. Eremin
, A. Ivanov
, E. Verbitskaya

Not published at VTT

Helsinki University of Technology
University of Oulu
Okmetic Oyj
European Organization for Nuclear Research (CERN)
Ioffe Institute
Helsinki Institute of Physics (HIP)

Research output: Contribution to journal › Article › Scientific › peer-review

47 Citations (Scopus)

Original language	English
Pages (from-to)	173-179
Journal	Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	514
Issue number	1-3
DOIs	https://doi.org/10.1016/j.nima.2003.08.102
Publication status	Published - 2003
MoE publication type	A1 Journal article-refereed

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10.1016/j.nima.2003.08.102

Cite this

Härkönen, J., Tuominen, E., Tuovinen, E., Mehtälä, P., Lassila-Perini, K., Ovchinnikov, V., Yli-Koski, M., Palmu, L., Kallijärvi, S., Nikkilä, H., Anttila, O., Niinikoski, T., Eremin, V., Ivanov, A., & Verbitskaya, E. (2003). Processing of microstrip detectors on Czochralski grown high resistivity silicon substrates. Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 514(1-3), 173-179. https://doi.org/10.1016/j.nima.2003.08.102

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author = "J. H{\"a}rk{\"o}nen and Eija Tuominen and E. Tuovinen and P. Meht{\"a}l{\"a} and K. Lassila-Perini and V. Ovchinnikov and M. Yli-Koski and L. Palmu and S. Kallij{\"a}rvi and H. Nikkil{\"a} and Olli Anttila and T. Niinikoski and V. Eremin and A. Ivanov and E. Verbitskaya",

year = "2003",

doi = "10.1016/j.nima.2003.08.102",

language = "English",

volume = "514",

pages = "173--179",

journal = "Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",

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Härkönen, J, Tuominen, E, Tuovinen, E, Mehtälä, P, Lassila-Perini, K, Ovchinnikov, V, Yli-Koski, M, Palmu, L, Kallijärvi, S, Nikkilä, H, Anttila, O, Niinikoski, T, Eremin, V, Ivanov, A & Verbitskaya, E 2003, 'Processing of microstrip detectors on Czochralski grown high resistivity silicon substrates', Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 514, no. 1-3, pp. 173-179. https://doi.org/10.1016/j.nima.2003.08.102

Processing of microstrip detectors on Czochralski grown high resistivity silicon substrates. / Härkönen, J.; Tuominen, Eija; Tuovinen, E. et al.
In: Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 514, No. 1-3, 2003, p. 173-179.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Processing of microstrip detectors on Czochralski grown high resistivity silicon substrates

AU - Härkönen, J.

AU - Tuominen, Eija

AU - Tuovinen, E.

AU - Mehtälä, P.

AU - Lassila-Perini, K.

AU - Ovchinnikov, V.

AU - Yli-Koski, M.

AU - Palmu, L.

AU - Kallijärvi, S.

AU - Nikkilä, H.

AU - Anttila, Olli

AU - Niinikoski, T.

AU - Eremin, V.

AU - Ivanov, A.

AU - Verbitskaya, E.

PY - 2003

Y1 - 2003

U2 - 10.1016/j.nima.2003.08.102

DO - 10.1016/j.nima.2003.08.102

M3 - Article

SN - 0168-9002

VL - 514

SP - 173

EP - 179

JO - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

IS - 1-3

ER -