Skip to main navigation Skip to search Skip to main content

Processing of n+/p-/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates

  • J. Härkönen*
  • , Esa Tuovinen
  • , P. Luukka
  • , A. Gädda
  • , T. Mäenpää
  • , E. Tuominen
  • , T. Arsenovich
  • , A. Junkes
  • , X. Wu
  • , Z. Li
    • *Corresponding author for this work
  • Helsinki Institute of Physics (HIP)
  • Hamburg University of Technology
  • VTT (former employee or external)
  • Picosun Oy
  • XiangTan University

Research output: Contribution to journal › Article › Scientific › peer-review

14   Link opens in a new tab Citations (Scopus)

Fingerprint

Dive into the research topics of 'Processing of n+/p-/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates'. Together they form a unique fingerprint.
Sort by

INIS

Keyphrases

Engineering

Material Science