Processing of n+/p-/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates
J. Härkönen (Corresponding Author), Esa Tuovinen, P. Luukka, A. Gädda, T. Mäenpää, E. Tuominen, T. Arsenovich, A. Junkes, X. Wu, Z. Li
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