Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy

P Fallon, V Veerasamy, C Davis, Jari Koskinen

Research output: Contribution to journalArticleScientificpeer-review

790 Citations (Scopus)

Abstract

A highly tetrahedrally bonded form on nonhydrogenated amorphous carbon (a-C) is produced by deposition from filtered medium-energy ion beams. A range of such films was grown and the sp3-bonded fractions, plasmon energies, compressive stresses, and resistivities were measured as a function of ion energy. These properties are found to be strongly correlated and each to pass through a maximum at an ion energy of about 140 eV. The optimum ion energy is observed to depend on the type of carbon ions deposited and, possibly, on the deposition flux rate. The data are found to support deposition models in which the sp3 bonding arises from the subplantation of incident ions, giving rise to a quenched increase in density and strain.
Original languageEnglish
Pages (from-to)4777 - 4782
Number of pages6
JournalPhysical Review B: Condensed Matter
Volume48
Issue number7
DOIs
Publication statusPublished - 1993
MoE publication typeA1 Journal article-refereed

Fingerprint

Ion beams
Carbon
ion beams
Ions
carbon
ions
energy
Amorphous carbon
flux (rate)
Compressive stress
Fluxes
electrical resistivity

Cite this

Fallon, P ; Veerasamy, V ; Davis, C ; Koskinen, Jari. / Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy. In: Physical Review B: Condensed Matter. 1993 ; Vol. 48, No. 7. pp. 4777 - 4782.
@article{de012893b30b4b5380e5db40a48a1ac0,
title = "Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy",
abstract = "A highly tetrahedrally bonded form on nonhydrogenated amorphous carbon (a-C) is produced by deposition from filtered medium-energy ion beams. A range of such films was grown and the sp3-bonded fractions, plasmon energies, compressive stresses, and resistivities were measured as a function of ion energy. These properties are found to be strongly correlated and each to pass through a maximum at an ion energy of about 140 eV. The optimum ion energy is observed to depend on the type of carbon ions deposited and, possibly, on the deposition flux rate. The data are found to support deposition models in which the sp3 bonding arises from the subplantation of incident ions, giving rise to a quenched increase in density and strain.",
author = "P Fallon and V Veerasamy and C Davis and Jari Koskinen",
note = "Project code: KOT1010",
year = "1993",
doi = "10.1103/PhysRevB.48.4777",
language = "English",
volume = "48",
pages = "4777 -- 4782",
journal = "Physical Review B",
issn = "2469-9950",
publisher = "American Physical Society",
number = "7",

}

Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy. / Fallon, P; Veerasamy, V; Davis, C; Koskinen, Jari.

In: Physical Review B: Condensed Matter, Vol. 48, No. 7, 1993, p. 4777 - 4782.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy

AU - Fallon, P

AU - Veerasamy, V

AU - Davis, C

AU - Koskinen, Jari

N1 - Project code: KOT1010

PY - 1993

Y1 - 1993

N2 - A highly tetrahedrally bonded form on nonhydrogenated amorphous carbon (a-C) is produced by deposition from filtered medium-energy ion beams. A range of such films was grown and the sp3-bonded fractions, plasmon energies, compressive stresses, and resistivities were measured as a function of ion energy. These properties are found to be strongly correlated and each to pass through a maximum at an ion energy of about 140 eV. The optimum ion energy is observed to depend on the type of carbon ions deposited and, possibly, on the deposition flux rate. The data are found to support deposition models in which the sp3 bonding arises from the subplantation of incident ions, giving rise to a quenched increase in density and strain.

AB - A highly tetrahedrally bonded form on nonhydrogenated amorphous carbon (a-C) is produced by deposition from filtered medium-energy ion beams. A range of such films was grown and the sp3-bonded fractions, plasmon energies, compressive stresses, and resistivities were measured as a function of ion energy. These properties are found to be strongly correlated and each to pass through a maximum at an ion energy of about 140 eV. The optimum ion energy is observed to depend on the type of carbon ions deposited and, possibly, on the deposition flux rate. The data are found to support deposition models in which the sp3 bonding arises from the subplantation of incident ions, giving rise to a quenched increase in density and strain.

U2 - 10.1103/PhysRevB.48.4777

DO - 10.1103/PhysRevB.48.4777

M3 - Article

VL - 48

SP - 4777

EP - 4782

JO - Physical Review B

JF - Physical Review B

SN - 2469-9950

IS - 7

ER -