Properties of low temperature PEALD SiO2

Matti Putkonen*, Riikka L. Puurunen, Oili Ylivaara, Markus Bosund, Timo Sajavaara, Mika Vähä-Nissi

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

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    Engineering

    Material Science