Properties of low temperature PEALD SiO2

Matti Putkonen (Corresponding author), Riikka L. Puurunen, Oili Ylivaara, Markus Bosund, Timo Sajavaara, Mika Vähä-Nissi

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Fingerprint

    Dive into the research topics of 'Properties of low temperature PEALD SiO2'. Together they form a unique fingerprint.

    Physics & Astronomy